Plasma enhanced ALD pore sealing for highly porous SiOCH films with k = 2.0

Kimura, Yosuke; Kobayashi, Akiko; Ishikawa, Dai; Nakano, Akinori; Matsushita, Kiyohiro; Kobayashi, Nozomu

doi:10.1109/iitc.2012.6251572

Cited by 9 publications

(14 citation statements)

References 5 publications

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“…Far away from the source, the nonlinear interference is weak and the fifth force contributes substantially to the total force felt by a test particle. The DGP model, massive gravity [35][36][37], Fab-Four [38][39][40][41] and kinetic gravity braiding [42][43][44], are examples of other models where the Vainshtein mechanism can be implemented (see also [45][46][47][48][49][50]). Another way to screen the fifth force in modified gravity theories is via nonlinear interactions of a scalar field with matter and/or itself.…”

Section: Introductionmentioning

confidence: 99%

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Nonlinear structure formation in the cubic Galileon gravity model

Barreira

Hellwing

et al. 2013

J. Cosmol. Astropart. Phys.

147

257

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We model the linear and nonlinear growth of large scale structure in the Cubic Galileon gravity model, by running a suite of N-body cosmological simulations using the ECOSMOG code. Our simulations include the Vainshtein screening effect, which reconciles the Cubic Galileon model with local tests of gravity. In the linear regime, the amplitude of the matter power spectrum increases by ∼ 20% with respect to the standard ΛCDM model today. The modified expansion rate accounts for ∼ 15% of this enhancement, while the fifth force is responsible for only ∼ 5%. This is because the effective unscreened gravitational strength deviates from standard gravity only at late times, even though it can be twice as large today. In the nonlinear regime (k 0.1hMpc −1 ), the fifth force leads to only a modest increase ( 8%) in the clustering power on all scales due to the very efficient operation of the Vainshtein mechanism. Such a strong effect is typically not seen in other models with the same screening mechanism. The screening also results in the fifth force increasing the number density of halos by less than 10%, on all mass scales. Our results show that the screening does not ruin the validity of linear theory on large scales which anticipates very strong constraints from galaxy clustering data. We also show that, whilst the model gives an excellent match to CMB data on small angular scales (l 50), the predicted integrated Sachs-Wolfe effect is in tension with Planck/WMAP results.

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Section: Introductionmentioning

confidence: 99%

“…Analytical studies of nonlinear structure formation are usually limited to special configurations, such as assuming spherical symmetry [87][88][89][90][91][92][93][94][95][96][97][98][99][100]. Therefore, one has to resort to N-body simulations to study the nonlinearities at a cosmological level.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear structure formation in the cubic Galileon gravity model

Barreira

Hellwing

et al. 2013

J. Cosmol. Astropart. Phys.

147

257

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“…For instance, a light plasma treatment (as described above) can narrow the pore diameter of the top surface without causing major damage, physically limiting the liner precursor penetration or diffusion. The results can also be obtained by chemical means: UV-assisted restoration 107 or silylation type treatments 108 can substitute silanols (formed during previous integration steps) with carbon groups, whose hydrophobic behavior inhibits interactions between pore walls and precursors.…”

Section: Ecs Journal Of Solid State Science and Technology 4 (1) N30mentioning

confidence: 99%

Toward Successful Integration of Porous Low-k Materials: Strategies Addressing Plasma Damage

Lionti

Volksen

Magbitang

et al. 2014

ECS J. Solid State Sci. Technol.

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The increasing sensitivity of porous low dielectric constant materials to process damage constitutes a major roadblock to their implementation in back-end-of-the-line (BEOL) wiring structures for advanced technology nodes. In the early 2000s and in anticipation to future low-k related integration challenges, the semiconductor industry started to investigate the possibility to repair or prevent this damage. It is remarkable that the most disruptive solutions proposed today are inspired from the work initiated more than 10 years ago. In this review we first describe the accepted mechanisms for plasma damage, followed by a quick summary of the methods used to quantify its extent on both blanket films and patterned structures. We then report on the past and current strategies developed to mitigate the plasma damage of porous, low-k materials during damascene integration processes.

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“…(2) give rise to modifications to gravity that may not be totally suppressed by the Vainshtein mechanism [61,62]. In fact, Refs.…”

Section: Overview Of Previous Observational Constraintsmentioning

confidence: 99%

“…[61,62], the implementation of the Vainshtein screening effect in models like the Quartic and Quintic Galileons may not be enough to suppress all local FIG. 5.…”

Section: B Local Time Variation Of G Eff In the Quartic Modelmentioning

confidence: 99%

The observational status of Galileon gravity after Planck

Barreira

Baugh

et al. 2014

J. Cosmol. Astropart. Phys.

131

196

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We use the latest CMB data from Planck, together with BAO measurements, to constrain the full parameter space of Galileon gravity. We constrain separately the three main branches of the theory known as the Cubic, Quartic and Quintic models, and find that all yield a very good fit to these data. Unlike in ΛCDM, the Galileon model constraints are compatible with local determinations of the Hubble parameter and predict nonzero neutrino masses at over 5σ significance. We also identify that the low-l part of the CMB lensing spectrum may be able to distinguish between ΛCDM and Galileon models. In the Cubic model, the lensing potential deepens at late times on sub-horizon scales, which is at odds with the current observational suggestion of a positive ISW effect. Compared to ΛCDM, the Quartic and Quintic models predict less ISW power in the low-l region of the CMB temperature spectrum, and as such are slightly preferred by the Planck data. We illustrate that residual local modifications to gravity in the Quartic and Quintic models may render the Cubic model as the only branch of Galileon gravity that passes Solar System tests.

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Plasma enhanced ALD pore sealing for highly porous SiOCH films with k = 2.0

Cited by 9 publications

References 5 publications

Nonlinear structure formation in the cubic Galileon gravity model

Nonlinear structure formation in the cubic Galileon gravity model

Toward Successful Integration of Porous Low-k Materials: Strategies Addressing Plasma Damage

The observational status of Galileon gravity after Planck

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