2022
DOI: 10.1016/j.nanoen.2021.106673
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Plasma engineering of microstructured piezo – Triboelectric hybrid nanogenerators for wide bandwidth vibration energy harvesting

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Cited by 19 publications
(18 citation statements)
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“…Surface Modification with Anti-Icing Grafting and Multilayers-ZnO Thin Films: Polycrystalline ZnO thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) at room temperature in an ERC MW plasma reactor as detailed elsewhere. [36][37][38] Typical thicknesses of the ZnO thin films deposited onto the LiNbO 3 substrate varied between 500 and 1500 nm, a range for which no significant differences were found by the de-icing and active anti-icing experiments.…”
Section: Methodsmentioning
confidence: 99%
“…Surface Modification with Anti-Icing Grafting and Multilayers-ZnO Thin Films: Polycrystalline ZnO thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) at room temperature in an ERC MW plasma reactor as detailed elsewhere. [36][37][38] Typical thicknesses of the ZnO thin films deposited onto the LiNbO 3 substrate varied between 500 and 1500 nm, a range for which no significant differences were found by the de-icing and active anti-icing experiments.…”
Section: Methodsmentioning
confidence: 99%
“…In comparison to individual nanogenerators, this nanogenerator type can provide high and efficient power density [ 95 ]. Recent research has led to the development of hybrid nanogenerators based on piezoelectric–pyroelectric [ 96 , 97 , 98 ], triboelectric–piezoelectric [ 31 , 99 , 100 , 101 , 102 , 103 , 104 , 105 , 106 , 107 , 108 , 109 , 110 , 111 , 112 , 113 , 114 , 115 , 116 , 117 ], electromagnetic–triboelectric [ 118 , 119 , 120 , 121 , 122 , 123 , 124 , 125 , 126 , 127 , 128 , 129 , 130 , 131 , 132 ], triboelectric–piezoelectric–pyroelectric [ 133 , 134 , 135 , 136 ], triboelectric–piezoelectric–electromagnetic [ 137 , 138 , 139 , ...…”
Section: Operation Principlementioning
confidence: 99%
“…With deeper research over the interim, TENGs have offered unique advantages in low-frequency energy collection, specifically, high output voltages from small input excitations [ 15 , 16 , 17 ]. They are widely used to harvest energy from environment, such as mechanical energy [ 18 , 19 , 20 ], tidal energy [ 21 , 22 , 23 ], and wind energy from various environments [ 24 , 25 , 26 , 27 , 28 ]. Currently, wind-energy harvesters operating with TENGs in the low-frequency regime have attained extensive attention because of their low cost, light weight, and high efficiency [ 29 , 30 , 31 ].…”
Section: Introductionmentioning
confidence: 99%