1999
DOI: 10.1002/(sici)1097-4628(19990705)73:1<1::aid-app1>3.0.co;2-4
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Plasma dissociation reaction kinetics. I. Methyl methacrylate

Abstract: Fourier transform infrared spectroscopy (FTIR) was utilized to study the plasma gas-phase reaction kinetics and reaction mechanisms in capacitively coupled glow discharges of methyl methacrylate (MMA) under zero monomer flow rate conditions. The gas-phase study shows two major electron-impact-induced dissociation pathways in MMA plasmas: the C-O bond cleavage reaction and decarboxylations. The C-O bond cleavage reaction accounts for approximately one-half of the MMA dissociation, and neutral formaldehyde and d… Show more

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Cited by 18 publications
(30 citation statements)
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References 31 publications
(38 reference statements)
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“…Moreover, systematic research on the deposition kinetics and thermal properties of plasma deposited films at atmospheric pressure as a function of T substrate is completely lacking. In this work, MMA is selected as a precursor because in literature, extensive efforts have been put in the chemical characterization of pdMMA thin films produced at atmospheric pressure . Differential scanning calorimetry is used in this work to quantify the thermal properties of pdMMA films, systematically measured as‐deposited, and produced in a DBD reactor operating at atmospheric pressure.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, systematic research on the deposition kinetics and thermal properties of plasma deposited films at atmospheric pressure as a function of T substrate is completely lacking. In this work, MMA is selected as a precursor because in literature, extensive efforts have been put in the chemical characterization of pdMMA thin films produced at atmospheric pressure . Differential scanning calorimetry is used in this work to quantify the thermal properties of pdMMA films, systematically measured as‐deposited, and produced in a DBD reactor operating at atmospheric pressure.…”
Section: Introductionmentioning
confidence: 99%
“…Specific to the decease of oxygen‐containing functionalities associated with increased plasma powers, a corresponding increase of CO emission in OES spectra (as shown later in Figure 11a) were detected in the LLA plasma vapor phase. This indicates that, under high‐energy conditions, the carbonyl‐containing fragments tend to convert to gaseous CO or CO 2 molecules and escape to result in the oxygen deficiency in the film 36, 37. Moreover, the strong signal at 127 ppm indicates that formation of C=C bonds can arise from both bond‐rupture reaction routes and UV‐induced Norrish type II reactions, as will be discussed more in detail later.…”
Section: Resultsmentioning
confidence: 94%
“…Closed (zero flow rate) MC plasmas were studied in a 2 2 full factorial designed experiment with the same pressure and power settings as those of the closed MMA plasma kinetics study ( pressure levels: 300 and 500 mT; power levels: 75 and 100 W) 2 . In situ FTIR was utilized to provide gas‐phase information at different plasma reaction times.…”
Section: Resultsmentioning
confidence: 99%
“…The same experimental setup and procedures from the previous article2 (“Plasma Dissociation Reaction Kinetics. I.…”
Section: Methodsmentioning
confidence: 99%
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