2010
DOI: 10.1088/0957-4484/21/8/085302
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Plasma directed assembly and organization: bottom-up nanopatterning using top-down technology

Abstract: Fabrication of periodic nanodot or nanocolumn arrays on surfaces is performed by top-down lithographic procedures or bottom-up self-assembly methods, which both make use of plasma etching to transfer the periodic pattern. Could plasma etching alone act as an assembly--organization method to create the pattern and then transfer it to the substrate? We present data that support this idea and propose a mechanism of periodicity formation where etching and simultaneous deposition take place.

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Cited by 57 publications
(50 citation statements)
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References 33 publications
(35 reference statements)
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“…However, the role of the etch inhibitors is not limited to the roughness instability. Experimental results (29) show that ordered periodic morphologies can be induced on plasma etched polymeric surfaces. Thus, what is different in plasma directed assembly and organization is that the control of the ratios of ions/neutrals/inhibitors as well as the selectivities and etching yields allows control of the order, the height, and the spacing of the formed nanostructures.…”
Section: What Is Different In Plasma Nanotexturing and Plasma Organizmentioning
confidence: 96%
See 1 more Smart Citation
“…However, the role of the etch inhibitors is not limited to the roughness instability. Experimental results (29) show that ordered periodic morphologies can be induced on plasma etched polymeric surfaces. Thus, what is different in plasma directed assembly and organization is that the control of the ratios of ions/neutrals/inhibitors as well as the selectivities and etching yields allows control of the order, the height, and the spacing of the formed nanostructures.…”
Section: What Is Different In Plasma Nanotexturing and Plasma Organizmentioning
confidence: 96%
“…Very recently we have demonstrated that plasma etching alone can be used for plasma directed organization to BOTH create the organized nanodot pattern on any nonspecialty commercial polymer, and then transfer it to the substrate (28) (29) . This finding has promoted plasma etching, an inherently top-down technology also as a bottom-up nanomanufacturing tool.…”
Section: Introductionmentioning
confidence: 99%
“…It can be used as a deposition tool for a variety of coatings, or it can increase the surface of the nanofibers by graphitization [161]. Due to its nature, plasma also creates nanostructuring on surfaces either due to etching or due to deposition [159][160] [162][164] [165], so it can also be a tool for the reconstruction of the desired micro/nanoenvironment that mimics the cardiac ECM. Finally, an additional advantage is the UV irradiation that plasma creates by default and is a benefit on the decontamination of surfaces.…”
Section: Post Treatment By Plasma Modificationmentioning
confidence: 99%
“…In nanotechnology to have an assessment of the different kinds of deviations from periodicity can be critical since they may be related to different fabrication conditions and/or surface functionalities [8][9]. Oxygen plasma etching in a plasma reactor [10,11]. (a) Top-down image and b) magnification 3D topography…”
Section: Characterization Of Almost Periodic Nanostructures: Period-smentioning
confidence: 99%