Plasma diagnostics by laser spectroscopic electric field measurement

Czarnetzki, Uwe; Luggenhölscher, Dirk; Kadetov, V. A.; Döbele, H. F.

doi:10.1351/pac200577020345

Cited by 20 publications

(18 citation statements)

References 1 publication

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“…The inductive power coupling design of the GEC cell is modified. It consists of a double spiral coil (bifilar) inside a monolithic quartz cylinder substituting the original one spiral coil in an aluminium cylinder with quartz window (in analogy to setups used by Czarnetzki et al) 12, 13. In the case of Figure 10, the vacuum chamber dimensions are increased to minimise diffusion losses, the chamber diameter is 600 mm, its height is 350 mm and the space between the upper bifilar coil and the lower electrode is 82 mm.…”

Section: Experimental Partmentioning

confidence: 99%

Experimental Characterisation of the Plasma Absorption Probe

Scharwitz

Böke

Hong

et al. 2007

Plasma Processes & Polymers

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The plasma absorption probe has been developed to provide a fast and efficient diagnostic tool for the characterisation of discharges, especially of reactive plasmas. Unlike Langmuir probes, the plasma absorption probe measures electron densities in reactive plasmas undisturbed by coatings of the probe surface. It consists of a semirigid coaxial cable with protruding inner conductor as an antenna, covered by a dielectric tube. The measurement principle is based on active resonance spectroscopy. A network analyser feeds the coaxial cable with HF of variable frequency and the power reflection spectrum is detected. At resonant frequencies, characteristic for the discharge, absorption signals are observed. In this paper, we present measurements of the plasma absorption probe for various discharge conditions and we evaluate the probes' further potential for the analysis of reactive plasmas.

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Section: Experimental Partmentioning

confidence: 99%

Experimental Characterisation of the Plasma Absorption Probe

Scharwitz

Böke

Hong

et al. 2007

Plasma Processes & Polymers

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“…In order to obtain a closer insight into these fundamental processes, one needs to investigate cause and effect of electron heating in CCRF discharges. The cause of electron heating is the electric field in the plasma boundary sheath and its temporal as well as spatial evolution within one RF cycle [1]. Its effect is the time and space dependent ionisation in the plasma, which can be probed through excitation [2,3,4].…”

Section: Introductionmentioning

confidence: 99%

Diagnostics of the plasma series resonance effect in radio-frequency discharges

Schulze¹,

Kampschulte²,

Luggenhölscher³

et al. 2007

J. Phys.: Conf. Ser.

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The intention of the paper is to give an example on how different plasma diagnostics can be combined in a synergistic way in order to investigate new physics. The link between the individual diagnostics has to be provided by theoretical concepts that predict certain relations between the different plasma parameters. The example chosen here is the effect of self-excited plasma series resonances in asymmetric capacitively coupled RF discharges. These resonance oscillations lead to high frequency current oscillations and are caused by a series resonance between the capacitive sheath and the effective inductance of the bulk which results from electron inertia. The non-linearity of the sheath is essential for the self-excitation of these oscillations. Laser spectroscopic electric field measurements, phase and space resolved optical emission spectroscopy, current, voltage, and Langmuir probe measurements are combined. The synergistic effect of these diagnostics in combination with a simple analytical model for the modification of the electron energy distribution function by electron beams yields information on cause and effect of electron heating and a better understanding of these fundamental phenomena.

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“…The Second method is based on appearance of prohibited lines in spectra of atoms or molecules in the presence of external electric field since wave functions of states in external field are described by the superposition of different states and selection rules legal for fields of central symmetry are broken. Superposition coefficients are calculated by the solving appropriate Shrödinger's equation and the relationship of intensity of prohibited line with field strength is revealed [21]. This result has great cognitive importance, illustrating practical profit of quantum mechanics technique.…”

Section: Optical Methods Of Plasma Diagnosticsmentioning

confidence: 89%

Optics related courses in research and education center Plasma at Petrozavodsk State University

2003

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The educational and research facilities in optics provided by the Research and educational center "Plasma" are described. Students study traditional, laser and correlation spectroscopy; interference and holography; image processing; nonlinear optics as well as methods of automated optical data acquisition and processing. The main attention in lectures, laboratory training and student's individual research works is attracted to optical methods applied to plasma diagnostics.

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Plasma diagnostics by laser spectroscopic electric field measurement

Cited by 20 publications

References 1 publication

Experimental Characterisation of the Plasma Absorption Probe

Experimental Characterisation of the Plasma Absorption Probe

Diagnostics of the plasma series resonance effect in radio-frequency discharges

Optics related courses in research and education center Plasma at Petrozavodsk State University

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