1988
DOI: 10.1351/pac198860050607
|View full text |Cite
|
Sign up to set email alerts
|

Plasma deposition and properties of composite metal/polymer and metal/hard carbon films

Abstract: Abstract

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

1
12
0

Year Published

1992
1992
2011
2011

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 42 publications
(13 citation statements)
references
References 0 publications
1
12
0
Order By: Relevance
“…2͑a͒. 21 The details of the particle size dependence on the deposition parameters is washed out due to the post-deposition annealing. Decreasing the argon flow has a similar effect since deposition at the same pressure requires a relative increase in the concentration of monomers.…”
Section: Resultsmentioning
confidence: 99%
“…2͑a͒. 21 The details of the particle size dependence on the deposition parameters is washed out due to the post-deposition annealing. Decreasing the argon flow has a similar effect since deposition at the same pressure requires a relative increase in the concentration of monomers.…”
Section: Resultsmentioning
confidence: 99%
“…• perfluoropropane C3FS with embedded Au, Mo, AI, Co, Ge or Cu nanoparticles [247,252,[256][257][258][259][260][261][262][263][264][265]]' • tetrafluoroethylene C2F4 with embedded Au or Mo nanoparticles [241,242,256,261,266,267] , • hexafluoroethane C2Fij with embedded Au or Mo nanoparticles [37,254,262]' • octafluoro-cyclobutane C4Fg with embedded Au [268] • tetrafluorocarbon CF4 with embedded Au, AI, Co or Mo nanoparticles [262,[269][270][271][272]]' • perfluorobutane C4F lO with embedded Mo nanoparticles [262]' • chlorotrifluoroethylene C2 CIF3 with embedded Au nanoparticles [271][272][273][274][275][276][277][278],…”
Section: 22 Andmentioning
confidence: 99%
“…Two different types of Ag‐containing coatings can be envisaged: a pure Ag layer,12–14 or Ag nanoparticles embedded in a matrix. In 1988 Biederman15 already reviewed different plasma deposition techniques of metal/polymer composite films. Especially, the optical and electrical properties were of interest for the films made by various process combinations of evaporation, plasma polymerization and sputtering 15.…”
Section: Introductionmentioning
confidence: 99%