Plasma deposition and characterization of silicon oxide-containing diamond-like carbon films obtained from CH4:SiH4:O2 gas mixtures

Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review

“…These results confirm that optical band gap in DLC:SiO x films is governed by existence of segregated phases of SiO x -DLC and SiO x in the films [16]. The refractive index of DLC:SiO x films might be as low as 1.62 [15,18,64], because softer and less-stressed a-SiO x network reduces density of the DLC:SiO x films [18]. The band gap and refractive index of the films strongly depends on the deposition conditions of DLC:SiO x .…”

“…In [28] hardness of the DLC:SiO x films deposited from HMDSO/H 2 or HMDSO/He gas mixtures non-monotonically depended on ion energy as well. Yet in [15] hardness of DLC:SiO x films increased from 10 GPa to 15 GPa with increase of the substrate bias from -100 V to -500 V. In [20] hardness of the DLC:SiO x film deposited by ICP PECVD increased from 10 GPa to 13 GPa with increase of the ICP plasma power from 150 W to 300 W.…”

“…The band gap and refractive index of the films strongly depends on the deposition conditions of DLC:SiO x . In [15] the influence of the bias voltage was determined. It was observed that refractive index increases and band gap decreases with increase of self-bias voltage.…”

Incorporation of Si and SiOx into diamond-like carbon films: Impact on surface properties and osteoblast adhesion

“…Whether these differences have a significant influence on the cell attachment is investigated below. techniques [25,[34][35][36][37][38]. For Si-DLC films, analysis of the Raman data shows that the sp 3 content in the films is increased as the Si concentration is increased.…”

Multiwavelength Raman analysis of SiOx and N containing amorphous diamond like carbon films

“…DLC films can also be modified with non-metallic components such as Si, O, N, and F. Probably, the most studied modified DLC coatings are with silicon (a-C:H:Si) due to interesting optical properties [14], higher thermal stability [15], and much lower friction coefficient [16] of these films. DLC films containing aSiO x network (SiO x -DLC) have already received considerable interest as a way to enhance the adhesion strength of DLC films on metallic substrates because such films have lower residual stress than conventional DLC films [17][18][19]. The existence of a-SiO x networks in DLC films can also give a positive effect on improving optical transparency of the films due to wide optical band gap of Si-O bond [20].…”