Plasma Assisted Deposition Technology of Optical Coating

Rong, Xiao; Li, Chun Xia; Zhang, Xiao Yan; Wang, Yu Mei; Wang, Wen Liang

doi:10.4028/www.scientific.net/amm.29-32.463

AMM

2010

DOI: 10.4028/www.scientific.net/amm.29-32.463

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Plasma Assisted Deposition Technology of Optical Coating

Xiao Rong

Chun Xia Li

Xiao Yan Zhang

et al.

Abstract: Plasma assisted deposition technology with an advanced plasma source and its application in the field of optical coating fabrication are investigated. In this paper, MgF2, Al2O3 and TiO2 single layer films are prepared by this technology, and the measure results show that they all have good optical parameter.

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Plasma Assisted Deposition Technology of Optical Coating

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