Plasma-assisted chemical vapour deposition of TiN and TiC on steel: Properties of coatings

Arai, Tohru; Fujita, Hideyuki; Oguri, Kazuyuki

doi:10.1016/0040-6090(88)90685-2

Cited by 82 publications

(22 citation statements)

References 10 publications

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“…Once this value was reached, the coefficient of friction became constant for the remaining distance. This result was in accordance with other papers independent from the method of deposition [8,19]. When the deposition temperature increased to 470 ∘ C, coefficient of friction also increased and reached 0.2-0.3.…”

Section: Resultssupporting

confidence: 80%

“…In TiC coating deposition via PACVD technique, the temperature, plasma power, duty cycle, and CH 4 and TiCl 4 flux rates are the fundamental parameters, because the amount of excess carbon is a very effective factor on the coating properties. It was shown by Stock et al, in 1998, that increasing the level of excess carbon can decrease coating hardness [4,8,9]. It is noteworthy that different researches have studied the ratio of TiCl 4 to CH 4 flux from 3 to 10 and until now there is a lack of published information on the fewer ratios.…”

Section: Introductionmentioning

confidence: 99%

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Properties of TiC Coating by Pulsed DC PACVD

Azadi

Rouhaghdam

Ahangarani

2013

Journal of Coatings

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In the PACVD technique, temperature and gas flow rate are two important parameters affecting the coating characteristics. Effect of these parameters on mechanical behaviors of TiC coating that was deposited on hot work tool steel (H13) was investigated in this paper. We analyzed TiC coating composition and structure with grazing incidence X-ray diffraction (GIXRD) and Fourier transformation infrared spectroscopy (FTIR). The mechanical properties of the coatings, such as microhardness, wear resistance, and surface roughness, were studied with Knoop hardness indentation, pin on disk wear tests, and atomic force microscopy, respectively. When the deposition temperature decreased from 490 ∘ C to 450 ∘ C and the CH 4 to TiCl 4 flow rate ratio was also increased from 1.5 to 6, TiC coating color changed from dark gray to silver. The best mechanical properties such as a high hardness (27 GPa), wear resistance, and low surface roughness were related to the coating that was deposited at 450 ∘ C.

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Section: Resultssupporting

confidence: 80%

Section: Introductionmentioning

confidence: 99%

Properties of TiC Coating by Pulsed DC PACVD

Azadi

Rouhaghdam

Ahangarani

2013

Journal of Coatings

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“…The mechanical properties of PECVD TiN and related compounds (Ti(C,N), Ti(O,C,N), Ti-Si-N) are comparable to CVD-or PVDdeposited films (Arai, Fujita and Oguri, 1988;Sanders and Verspui, 1988;Jang, Chun and Kim, 1989;Laimer, St6ri and R6dhammer, 1990;Shizhi, Yulong and Hongrui, 1992). In general, the hardness of PECVD TiN coatings increases with increasing temperature and decreasing chlorine content (Arai, Fujita and Oguri, 1988;Sanders and Verspui, 1988).…”

Section: Silicon Nitride (Si 3 N 4 )mentioning

confidence: 85%

Carbide, Nitride and Boride Materials Synthesis and Processing

Weimer¹

1997

254

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“…Dengan defenisi ini maka kekerasan berbanding lurus dengan modulus bulk-nya, B yang didefenisikan sebagai [2][3] Namun demikian, dalam praktek, pengukuran kekerasan ini sangat teknis sehingga menyebabkan banyak data kekerasan dari material yang sama dilaporkan secara berbeda-beda dari literatur ke literatur. Sebagai contoh, kekerasan TiN dilaporkan sangat bervariasi tergantung metode pembuatannya dari yang paling rendah 2-3 Gpa [4], sampai suatu harga yang sesuai dengan TiN stoikometri antara 20 GPa [5][6] dan 25 GPa [7]. Untuk macam-macam teknik PVD (Physical Vapour Deposition) dilaporkan suatu nilai yang tidak realistis yaitu 35 GPa untuk plasma CVD (Chemical Vapour Deposition) [8] dan 70 -80 GPa untuk teknik reactive sputtering [9][10].…”

Section: Pendahuluanunclassified

PROSEDUR PENGUKURAN KEKERASAN YANG BENAR PADA NANOKOMPOSIT nc-TiN/a-Si3N4

Moto

2010

MST

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AbstrakKekerasan nanokomposit nc-TiN/a-Si 3 N 4 yang diperoleh dengan dengan dua metode pengukuran yaitu pengukuran kedalaman indentor dan pengukuran luas bekas indentasi yang diperbesar dengan SEM (Scanning Electron Microscope) memberikan hasil yang sama. Nilai kekerasan yang diperoleh tidak dipengaruhi oleh biaksial dan residual kompresif stress. Pengukuran biaksial stress pada substrat menghasilkan nilai yang sangat kecil dan perlakuan termal menunjukkan kekerasan yang tetap dengan ukuran butir yang tetap. Kekerasan yang diperoleh diyakini sebagai nilai kekerasan yang intrinsik yang tergantung pada sifat mikrostrukturnya. AbstractHardness of nc-TiN/a-Si 3 N 4 nanocomposites which was determined by using two methods of measurements i. e. depth sensing method and remaining plastic indentation area that were magnified by using SEM (Scanning Electron Microscope) lie in the good agreement. The hardness value is not influenced by the biaxial and residual compressive stress. The measurement of the biaxial stress on the substrate shows a very small value of biaxial stress as well as the constant hardness and crystallite size against annealing temperature. Therefore, the reported hardness value here is the intrinsic value that depend on its microstructure properties.

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Plasma-assisted chemical vapour deposition of TiN and TiC on steel: Properties of coatings

Cited by 82 publications

References 10 publications

Properties of TiC Coating by Pulsed DC PACVD

Properties of TiC Coating by Pulsed DC PACVD

Carbide, Nitride and Boride Materials Synthesis and Processing

PROSEDUR PENGUKURAN KEKERASAN YANG BENAR PADA NANOKOMPOSIT nc-TiN/a-Si3N4

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