2020
DOI: 10.3390/nano10071335
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Plasma-Assisted Chemical Vapor Deposition of F-Doped MnO2 Nanostructures on Single Crystal Substrates

Abstract: MnO2 nanostructures were fabricated by plasma assisted-chemical vapor deposition (PA-CVD) using a fluorinated diketonate diamine manganese complex, acting as single-source precursor for both Mn and F. The syntheses were performed from Ar/O2 plasmas on MgAl2O4(100), YAlO3(010), and Y3Al5O12(100) single crystals at a growth temperature of 300 °C, in order to investigate the substrate influence on material chemico-physical properties. A detailed characterization through complementary analytical techniques… Show more

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Cited by 7 publications
(1 citation statement)
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“…[207][208][209][210] Fluoroalkoxides are also hydrophobic, providing additional stability against hydrolysis from atmospheric moisture. 207 While fluorinated ligands are sometimes reported in SSPs for fluorine-doped materials, 211 most commonly fluorinedoped tin oxide (FTO), 212,213 it is feasible to fabricate thin films without fluorine incorporation despite using fluorinated precursors. The strong C-F bond means complexes will thermally decompose into more stable fluorine-containing fragments, removing the fluorine atoms as process-inert by-products and preventing incorporation into the film.…”
Section: Deposition Requirementsmentioning
confidence: 99%
“…[207][208][209][210] Fluoroalkoxides are also hydrophobic, providing additional stability against hydrolysis from atmospheric moisture. 207 While fluorinated ligands are sometimes reported in SSPs for fluorine-doped materials, 211 most commonly fluorinedoped tin oxide (FTO), 212,213 it is feasible to fabricate thin films without fluorine incorporation despite using fluorinated precursors. The strong C-F bond means complexes will thermally decompose into more stable fluorine-containing fragments, removing the fluorine atoms as process-inert by-products and preventing incorporation into the film.…”
Section: Deposition Requirementsmentioning
confidence: 99%