2023
DOI: 10.1016/j.optmat.2023.113494
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Plasma assisted atomic layer deposition NiO nanofilms for improved hybrid solid state electrochromic device

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Cited by 5 publications
(6 citation statements)
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“…Compared with the sol−gel method, the thickness of the ALD NiO film can be accurately controlled to achieve better uniformity and compactness. 47 Furthermore, the plasma-enhanced ALD (PEALD) method was applied to deposit NiO films with fewer defects by adjusting the environmental oxygen (O 2 ). By varying the plasma flow rate of O 2 (0−200 sccm), Ni 2+ and interstitial oxygen vacancies are generated within the NiO film, which could increase the conductivity and density of holes in the NiO film.…”
Section: ■ Introductionmentioning
confidence: 99%
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“…Compared with the sol−gel method, the thickness of the ALD NiO film can be accurately controlled to achieve better uniformity and compactness. 47 Furthermore, the plasma-enhanced ALD (PEALD) method was applied to deposit NiO films with fewer defects by adjusting the environmental oxygen (O 2 ). By varying the plasma flow rate of O 2 (0−200 sccm), Ni 2+ and interstitial oxygen vacancies are generated within the NiO film, which could increase the conductivity and density of holes in the NiO film.…”
Section: ■ Introductionmentioning
confidence: 99%
“…In this work, low-temperature atomic layer-deposited (ALD) NiO is used as the electrode buffer layer. Compared with the sol–gel method, the thickness of the ALD NiO film can be accurately controlled to achieve better uniformity and compactness . Furthermore, the plasma-enhanced ALD (PEALD) method was applied to deposit NiO films with fewer defects by adjusting the environmental oxygen (O 2 ).…”
Section: Introductionmentioning
confidence: 99%
“…NiO is widely used by researchers due to its exceptional characteristics. This material is used in various fields, such as battery cathodes [2], solar cells [3], electrochromic coatings [4], antiferromagnetic materials [5], smart windows [6], and supercapacitors [7], due to its remarkable properties such as having a wide band gap ranging between 3.6 to 4.0 eV. The surface area, color, and nonstoichiometric levels of NiO samples can vary depending on the preparation conditions [8].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, the development of EC materials that can serve with high stability, balanced EC performance, and wide color modulation capability in various moist, dry, and saline environments, in contact with aqueous or nonaqueous liquids, is greatly desired. 10,11 Compared to those commonly used fabrication methods for EC materials such as sputtering, e-beam evaporation, spin coating, sol−gel, hydrothermal, or inkjet printing, 2,7,9,12 atomic layer deposition (ALD) is a much less explored fabrication method for EC coating 13,14 but can offer the most impermeable functional layer. 14 Previous studies only reported ALD coating as a stabilization overlayer for the EC device.…”
Section: Introductionmentioning
confidence: 99%
“…Compared to those commonly used fabrication methods for EC materials such as sputtering, e-beam evaporation, spin coating, sol–gel, hydrothermal, or inkjet printing, ,,, atomic layer deposition (ALD) is a much less explored fabrication method for EC coating , but can offer the most impermeable functional layer . Previous studies only reported ALD coating as a stabilization overlayer for the EC device. , This work attempts to fill this gap by exploring ALD-grown EC coatings as a subset of emerging EC materials that potentially possess both excellent EC performance and high stability.…”
Section: Introductionmentioning
confidence: 99%