Planarization of CMOS ROIC dies for uncooled detectors

Wang, Hongchen; Yi, Xiaoou; Chen, Sihai; He, Shi; Fu, Xiaochao; Ma, Hong

doi:10.1016/j.infrared.2004.12.002

Cited by 6 publications

(3 citation statements)

References 10 publications

(11 reference statements)

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“…With curing temperature 160 ºC the planarization level can be further improved by reducing the surface topology to about 110nm. The final surface roughness (Figure 3) of 83nm with curing temperature 170 ºC is in substantial agreement with the reported value of 800 Å and 600Å and the measured DOP of 95.9% and 97% which planarization was two layers of BCB [5,6]. Figure 2 shows when the softcuring temperature is higher than 170 o C, etching time is 65s, the contacthole can't be etched completely before photoresist floating, so it needs an ICP process to etch polymer films completely.…”

Section: Roughness Of Polymer Films As Planarization Layerssupporting

confidence: 89%

“…Punit Chiniwalla has successfully planarized the surface topology of an experimental structure from 2 µm to about 800 Å using spin coating method [4]. Hongchen Wang has also reduced the surface roughness of ROIC dies from 2 µm to less than 1500 Å , which satisfies the surface topology requirement for the subsequent fabrication of flat microbolometer structure [5]. In this paper, we chose the spin coating method for planarization of ROIC.…”

Section: Introductionmentioning

confidence: 99%

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Polymer films as planarization and sacrificial layers for uncooled infrared focal plane arrays

Liu

Cai

et al. 2010

Seventh International Conference on Thin Film Physics and Applications

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This paper presents a planarization procedure using polymer films to achieve a flat CMOS surface of Readout Integrated Circuit (ROIC) for the integration between uncooled infrared focal plane arrays and ROIC. At the same time, the polymer film is also used as the sacrificial layers. After amorphous Silicon (a-Si) film was deposited using plasma enhanced chemical vapor deposition (PECVD), and patterned using inductively coupled plasma (ICP), the polymer sacrificial layer should be removed to form a-Si self-supporting micro-bridge structure. So the thickness of polymer film determine the height of the micro-bridge; the soft curing temperature determines if the contact hole can be etched by developer during the first photolithography; and the rate of dry etching determines whether the sacrificial layers of the structure can be released successfully. In this paper, the curing temperature, surface roughness, etching process of polymer films are systematically researched. On this basis, polymer film as planarization successfully reduces the 2μm height of the bumps on ROIC to less than 83 nm, over the planarized polymer mesas, bolometer arrays are fabricated. Then the polymer film as sacrificial are removed by ICP and 160×120 self-supporting micro-bridge structure arrays are successfully fabricated

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Section: Roughness Of Polymer Films As Planarization Layerssupporting

confidence: 89%

Section: Introductionmentioning

confidence: 99%

Polymer films as planarization and sacrificial layers for uncooled infrared focal plane arrays

Liu

Cai

et al. 2010

Seventh International Conference on Thin Film Physics and Applications

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“…And based on the three criterions, it also proposed first order derivative edge detection operator of suboptimal Gaussian type function. What' more, Canny algorithm has a strong anti-noise ability and an excellent performance of edge detection, so it can obtain thin, complete and consecutive edges of images, and it has a pretty low time cost as a result of its comparatively simple algorithm [6][7][8]. The image after Canny edge detection is shown in Fig.…”

Section: Processing Of the Path Imagementioning

confidence: 99%

Design of an Intelligent Vehicle System for Storehouse Management Based on Image Processing and RFID Technologies

Chen

et al. 2011

AMR

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This paper describes a new intelligent storehouse management vehicle system based on image processing and Radio Frequency Identification (RFID) technologies to ensure the security of storehouses of logistics enterprises and improve the efficiency of storage. The vehicle is able to go ahead automatically by visual navigation in storehouses with the function of face recognition and alarm, as well as automatic statistics of commodities. Hough transformation is used to detect straight lines for angle control, and RFID based component is applied to the commodity management. The results show that our vehicle and storehouse management system can successfully fulfill various tasks with high accuracy of performance, which will lead to a practical merchandise application after further improvements.

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