The Ca x Ba 1−x Nb 2 O 6 (CBN-x) optical ridge waveguides for electro-optic phase modulation were fabricated on a silicon substrate. The method of waveguide fabrication presented here resulted in a device with a high-quality guiding layer, i.e. with better crystallinity over 140 nm grains of preferred (0 0 1) orientation, high transmission exceeding 94% for 1550 nm wavelength and improved electro-optic coefficient, over 15 pm V −1 . Pulsed laser deposition of CBN film on a pre-patterned 10 μm thick layer of silicon dioxide allows the spatial separation of the guiding CBN layer thus enabling optical signal coupling. A contact layer is introduced on both sides of the waveguides in order to enable electro-optic response testing.