The self-assembly of molecules or small clusters, that is, the spontaneous association of atomic or molecular building blocks under equilibrium conditions, is emerging as a successful chemical strategy to fabricate well-defined structures of nanometer dimensions, with potential applications in many areas of nanotechnology.[1] This bottom-up approach of synthesis is a promising way to design novel nanoscale functional materials with atomic precision. The construction of complex supramolecular aggregates from organic molecular building blocks by the self-assembly route has been successfully demonstrated recently. [2,3] Herein, we explore the possibility of fabricating surface-supported nanoscale oxide materials in low dimensions by a chemically driven selfassembly process with oxide cluster molecules. As opposed to the usual molecular self-assembly, where the construction units are deposited directly from the gas phase, the oxide building blocks with a unique uniform stoichiometry and structure form spontaneously on a metal surface. These building blocks can then be organized into different twodimensional (2D) oxide structures by careful adjustment of the chemical potential of oxygen m O , which allows the controlled design of oxide nanostructures on a metal surface. This process is demonstrated with the formation and subsequent aggregation of planar vanadium oxide [V 6 O 12 ] clusters, monitored in situ, under ultrahigh vacuum (UHV), on an Rh(111) surface at the atomic level by scanning tunneling microscopy (STM). The fabrication of ultrathin layers of vanadium oxides has potential commercial interest in the socalled monolayer catalysts, in advanced coating systems, and in optical devices. [4] The [V 6 O 12 ] clusters form spontaneously on an Rh(111) surface after deposition of vanadium atoms at submonolayer coverages under appropriate temperature and sufficiently oxidizing conditions (Figure 1 a). They are a unique, novel form of "oxide molecules" with a planar 2D hexagonal structure (Figure 1 b), which is stabilized by interaction with the rhodium surface but is unstable in the gas phase.