Planar microlens with front-face angle: design, fabrication, and characterization

Hafiz, Abdullah Al; Michael, Aron; Kwok, Chee Yee

doi:10.1117/1.jmm.15.3.035501

J. Micro/Nanolith. MEMS MOEMS

2016

DOI: 10.1117/1.jmm.15.3.035501

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Planar microlens with front-face angle: design, fabrication, and characterization

Abdullah Al Hafiz

Aron Michael

Chee Yee Kwok

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Planar microlens with front-face angle: design, fabrication, and characterization

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References 22 publications

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