Experiments have been carried out to investigate the polar distribution of atomic material ablated during the pulsed laser deposition of Cu in vacuum. Data were obtained as functions of focused laser spot size and power density. Thin films were deposited onto flat glass substrates and thickness profiles were transformed into polar atomic flux distributions of the form f ͑͒ϭcos n . At constant focused laser power density on target, Iϭ4.7Ϯ0.3ϫ10 8 W/cm 2 , polar distributions were found to broaden with a reduction in the focused laser spot size. The polar distribution exponent n varied from 15Ϯ2 to 7Ϯ1 for focused laser spot diameter variation from 2.5 to 1.4 mm, respectively, with the laser beam exhibiting a circular aspect on target. With the focused laser spot size held constant at ϭ1.8 mm, polar distributions were observed to broaden with a reduction in the focused laser power density on target, with the associated polar distribution exponent n varying from 13Ϯ1.5 to 8Ϯ1 for focused laser power density variation from 8.3Ϯ0.3ϫ10 8 to 2.2Ϯ0.1ϫ10 8 W/cm 2 , respectively. Data were compared with an analytical model available within the literature, which correctly predicts broadening of the polar distribution with a reduction in focused laser spot size and with a reduction in focused laser power density, although the experimentally observed magnitude was greater than that predicted in both cases.