Planar Lab-On-A-Chip Micro Mass Spectrometer with Time-Of-Flight Separation

Westerdick, Stephan; Walther, Bent; Hermanns, Patrick; Fricke, Florian; Musch, Thomas

doi:10.1109/mems51782.2021.9375289

Cited by 2 publications

(2 citation statements)

References 3 publications

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“…This technique is used not only for MEMS fabrication but also for many other applications. For example, for THz optics [29], subwavelenght optics [30], micro mass spectrometer [31] and different others.…”

Section: Introductionmentioning

confidence: 99%

Wideband MOEMS for the Calibration of Optical Readout Systems

Volkov

Luk’yanov

Goryunov

et al. 2021

Sensors

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The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts. The micromembranes were formed by thermal evaporation of Al. This simplified the technique compared to the classic UV-LIGA and guaranteed high quality and uniformity of the resulting structure. To demonstrate the complete process, a test MOEMS with electrostatic control was manufactured. On one chip, a set of micromembranes was created with different stiffness from 10 nm/V to 100 nm/V and various working ranges from 100 to 300 nm. All membranes have a flat frequency response without resonant peaks in the frequency range 0–200 kHz. The proposed technology potentially enables the manufacture of wide low-height membranes of complex geometry to create microoptic fiber sensors.

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Section: Introductionmentioning

confidence: 99%

Wideband MOEMS for the Calibration of Optical Readout Systems

Volkov

Luk’yanov

Goryunov

et al. 2021

Sensors

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“…Fortunately, thanks to rapidly developing technology and an increasing level of production [23], a number of portable wearable spectrometers are now available that allow such analyses to be performed. These spectrometers implement the "Lab-On-A-Chip" (LoC) (or sometimes even "System-On-A-Chip" (SoC)) concept, which involves using a microchip to perform a complete biochemical analysis procedure, allowing one or more processes on one microchip using a minimum number of samples for the study [24].…”

Section: Introductionmentioning

confidence: 99%

Prototype Design and Experimental Evaluation e-Healthcare System based on Molecular Analysis Devices

Zakharov¹,

Paramonov²,

Muthanna³

et al. 2021

IJACSA

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Recently, wireless body area networks (WBANs) and mobile Internet of Things (IoT) have been greatly increased and integrated into a different type of systems such as electronic/mobile-healthcare (e/m-healthcare) systems. In addition, analyzing the composition of drugs or performing the medical rapid tests in the conditions field are the main tasks of the m-healthcare system, in which the traditional laboratory methods of analysis are not suitable. Therefore, in this study, we proposed a novel structure with a distributed e-health system to perform such analysis, where portable infrared micro spectrometers are utilized and then boundary calculations are applied. More specifically, this system is proposed to use a portable infrared micro spectrometer with a specially designed application connected to a public communication network, which can process the results of analysis using boundary calculations. Moreover, it provides remote processing and long-term storage of analysis data using artificial neural networks and cloud technologies. Finally, simulation results show that preprocessing (error checking), data buffering and Edge Computing can significantly reduce the network latency and volume of transferred data.

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Planar Lab-On-A-Chip Micro Mass Spectrometer with Time-Of-Flight Separation

Cited by 2 publications

References 3 publications

Wideband MOEMS for the Calibration of Optical Readout Systems

Wideband MOEMS for the Calibration of Optical Readout Systems

Prototype Design and Experimental Evaluation e-Healthcare System based on Molecular Analysis Devices

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