Abstract:We present a method to fabricate planar metal layers to be used as micromachined mirrors. Released mirrors of pure metal involve severe stress and reveal specific challenges to obtain planar mirror structures. Introducing sub-structures generating corrugated patterns, the metal mirror layers can be mechanically stabilized and undesired mirror bending can be reduced. For our investigations we used different arrangements of line structures on our metal mirrors, such as a group of straight or curved lines oriente… Show more
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