Planar fabrication of multilayer piezoelectric actuator by groove cutting and electroplating

Suzuki, Gaku; Esashi, Masayoshi

doi:10.1109/memsys.2000.838488

Cited by 8 publications

(3 citation statements)

References 9 publications

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“…the line of electric force does not penetrate the proof mass, being blocked by the metal conductive layer. As another example, thick bulk ferroelectric materials are generally difficult to dryor wet-etch by micromachining [14], which makes it difficult to pattern the shapes of both the mass and the beams. Therefore, in the present study, a comb-shaped electrode is set underneath the proof mass and a bulk ferroelectric material is used as the substrate, as shown in Fig.…”

Section: Aim and Conceptmentioning

confidence: 99%

High‐sensitivity surface micromachinable accelerometer using a ferroelectric substrate and its characterization

Aoyagi

Isono

2007

IEEJ Transactions Elec Engng

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The present study reports the fabrication and characterization of a high-sensitivity surface micromachinable accelerometer using a ferroelectric material having a large dielectric constant, such as bulk PZT (ε r = 2600). The measurement principle is the detection of capacitance change with respect to the dielectric mass movement in the fringe electrical field. Considering the practical fabrication, a ferroelectric material is used for the substrate instead of the suspended proof mass. Since capacitance is increased not mechanically but electrically, high sensitivity can be expected while maintaining mechanical stiffness, which has the advantage of preventing touch down of the proof mass and widening the allowable measuring range of acceleration. A fabricated sensor is characterized. A high sensitivity of several sub-pF/g is confirmed, which is hundreds of times higher compared to that of a sensor fabricated using the Parylene polymer (ε r = 3.15). This sensitivity is an order higher compared to those of other reported capacitive microaccelerometers, which have comparable proof mass sizes and comparable detectable acceleration ranges to the newly fabricated sensor. 

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Section: Aim and Conceptmentioning

confidence: 99%

High‐sensitivity surface micromachinable accelerometer using a ferroelectric substrate and its characterization

Aoyagi

Isono

2007

IEEJ Transactions Elec Engng

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“…For example, thick sol-gel PZT film requires a seed layer of metal Pt/Ti [12], which violates the measuring principle, i.e., the electrical field does not penetrate inside the proof mass, it being blocked by the metal conductive layer. In addition, thick bulk ferroelectric materials are generally difficult to be dry or wet etched by micromachining [13], which makes it difficult to pattern the shapes of both mass and beams. Considering these facts, comb-shaped electrodes were set underneath the proof mass, and a bulk ferroelectric material was used as a substrate, as shown in Fig.…”

Section: Goal and Conceptmentioning

confidence: 99%

Surface micromachined accelerometer using ferroelectric substrate

Aoyagi

Kumagai

Yoshikawa

et al. 2007

Sensors and Actuators A: Physical

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“…Moreover, it is much easier to wire the electrodes of multiple-tube actuators than to wire those of multilayer actuators. 6,7)…”

Section: Introductionmentioning

confidence: 99%

Two-Phase Piezoelectric Motor Using a Multiple-Tube Structure Actuator

Pan

Zhang

et al. 2009

Jpn. J. Appl. Phys.

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The construction of piezoelectric motors using multiple piezoelectric tubes is proposed in this paper. The static and dynamic characteristics of an eight-tube actuator are studied. The formulas of the bending deflection, moment, and resonant frequency are given. A prototype two-phase traveling wave piezoelectric motor using such a structure is studied. The stator that is composed of eight piezoelectric tubes produces a wobbling motion when excited in a certain pattern. Both the static and dynamic characteristics of the stator were measured. The rotor's angular speed possesses a good linearity with the driving voltage amplitude. With a driving voltage of 200 Vp–p at 5.0 kHz, the motor can rotate at the highest angular speed of 319 rpm and produce a maximum stall torque of 1.6 mN·m. With an applied voltage of 160 Vp–p and a preload of 0.3 N, the motor's working efficiency reached about 12%.

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Planar fabrication of multilayer piezoelectric actuator by groove cutting and electroplating

Cited by 8 publications

References 9 publications

High‐sensitivity surface micromachinable accelerometer using a ferroelectric substrate and its characterization

High‐sensitivity surface micromachinable accelerometer using a ferroelectric substrate and its characterization

Surface micromachined accelerometer using ferroelectric substrate

Two-Phase Piezoelectric Motor Using a Multiple-Tube Structure Actuator

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