PIXE analysis of multilayer targets

Reis, M.A.; Barradas, N.P.; Chaves, P.C.; Taborda, A.

doi:10.1002/xrs.1322

Cited by 10 publications

(9 citation statements)

References 25 publications

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“…Demonstrations of combining a single TES detector pixel with PIXE have been published before 8 , but the energy resolution achieved (∼ 18 eV at 1.7 keV) has been much worse than in this work, and quite far from the expected theoretical limits of ∼ 1.3 eV for a typical TES detector at that energy 9 .…”

Section: Introductioncontrasting

confidence: 54%

Transition-Edge Sensors for Particle Induced X-ray Emission Measurements

et al. 2013

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In this paper we present a new measurement setup, where a transitionedge sensor detector array is used to detect X-rays in particle induced X-ray emission measurements with a 2 MeV proton beam. Transition-edge sensors offer orders of magnitude improvement in energy resolution compared to conventional silicon or germanium detectors, making it possible to recognize spectral lines in materials analysis that have previously been impossible to resolve, and to get chemical information from the elements. Our sensors are cooled to the operation temperature (65 mK) with a cryogen-free adiabatic demagnetization refrigerator, which houses a specially designed X-ray snout that has a vacuum tight window to couple in the radiation. For the best pixel, the measured instrumental energy resolution was 3.06 eV full width at half maximum at 5.9 keV.We discuss the current status of the project, benefits of transition-edge sensors when used in particle induced X-ray emission spectroscopy, and the results from the first measurements.Comment: 6 pages, 3 figure, LTD-15 proceeding

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Section: Introductioncontrasting

confidence: 54%

Transition-Edge Sensors for Particle Induced X-ray Emission Measurements

et al. 2013

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“…Furthermore, using the high resolution (microcalorimeter) EDS X-ray detectors now available, information can also be obtained on the chemical state of the elements present in the sample from the ratios of the family of lines from each shell (usually inaccessible by WDS due to an insufficient energy range) by hr-PIXE-EDS. 5 The new generation of EDS detectors are also potentially capable of sufficient energy resolution to detect chemical shifts. 6 We should mention the possibility of getting chemical bond information by total IBA using a method related to static SIMS.…”

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confidence: 99%

Accurate Determination of Quantity of Material in Thin Films by Rutherford Backscattering Spectrometry

2012

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Ion beam analysis (IBA) is a cluster of techniques including Rutherford and non-Rutherford backscattering spectrometry, and particle-induced X-ray emission (PIXE). Recently, the ability to treat multiple IBA techniques (including PIXE) self-consistently has been demonstrated. The utility of IBA for accurately depth profiling thin films is critically reviewed. As an important example of IBA, three laboratories have independently measured a silicon sample implanted with a fluence of nominally 5.1015As/cm2 at an unprecedented absolute accuracy. Using 1.5 MeV 4He+ Rutherford backscattering spectrometry (RBS), each lab has demonstrated a combined standard uncertainty around 1% (coverage factor k=1) traceable to an Sb-implanted certified reference material through the silicon electronic stopping power. The uncertainty budget shows that this accuracy is dominated by the knowledge of the electronic stopping, but that special care must also be taken to accurately determine the electronic gain of the detection system and other parameters. This RBS method is quite general and can be used routinely, to accurately validate ion implanter charge collection systems, to certify SIMS standards, and for other applications. The generality of application of such methods in IBA is emphasised: if RBS and PIXE data are analysed self-consistently then the resulting depth profile inherits the accuracy and depth resolution of RBS and the sensitivity and elemental discrimination of PIXE

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“…Spectra deconvolutions were carried out using the DT2fit code in its early 2010 version. This code includes a Bayesian inference algorithm by Barradas for improved fitting and determination of the error levels associated to the fitted line areas.…”

Section: Methodsmentioning

confidence: 99%

“…Proton-Induced X-ray Emission (PIXE) analysis using K a or L a transition is presently a common task in which it is usually assumed that the ratio between two X-ray lines to the same subshell (before matrix effects are considered) is an atomic parameter independent of the ionisation process and of the chemical environment surrounding the emitting ion. That this is in detail not exactly the case is a well-known fact shown by several authors, [1][2][3][4][5][6][7][8][9][10] and as more and more complex analytical problems are being faced, [11][12][13] a proper account of the relative intensity of X-ray lines becomes essential to always assure a correct quantification of all elements present in a sample.…”

Section: Introductionmentioning

confidence: 99%

H⁺ and He^2 + induced W L X‐rays intensity ratios: part I, Si(Li) data and EDS high resolution insight

et al. 2013

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Recently, the authors have presented experimental evidences that for some energy windows, proton-induced W L shell X-rays intensity ratios of transitions to L 1 subshell depend on the ion beam energy and on the chemical species even after known matrix effects are subtracted. These results, which put in question the assumption of the invariance of the relative intensity of X-ray transitions to the same atomic subshells, are further exploited in this work, where more data for three different W compounds (W, Li 2 WO 4 and P 2 O 5 .24WO 3 .xH 2 O) are presented followed by a detailed study using an ultra-pure (99.995%) W thick foil, used to avoid any possible target contamination interference on the results. Samples were irradiated by H + beams in various conditions in the energy range between 0.25 and 2.38 MeV and by He 2 + beams having energies between 3.5 and 5.0 MeV. Spectra were collected using the Si(Li) detector at CTN 2.5 MV Van de Graaff standard Proton-Induced X-ray Emission (PIXE) set-up as well as using the Energy Dispersive Spectrometry (EDS) high resolution X-ray microcalorimeter spectrometer (XMS) at CTN 3.0 MV Tandetron accelerator high resolution high energy (HRHE) PIXE end station. Results were normalized to the theoretical intensity ratios and plotted as function of the ratio of collision characteristic times allowing the comparison of H + and He 2 + results. W L X-rays intensity ratio variations are presented and compared with theoretical expected results. Radiative Auger emission transitions observed in an EDS high resolution XMS spectra are shown to probably play a crucial role in the highly unexpected results obtained for intensity ratios of transitions to the same subshell.

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PIXE analysis of multilayer targets

Cited by 10 publications

References 25 publications

Transition-Edge Sensors for Particle Induced X-ray Emission Measurements

Transition-Edge Sensors for Particle Induced X-ray Emission Measurements

Accurate Determination of Quantity of Material in Thin Films by Rutherford Backscattering Spectrometry

H⁺ and He^2 + induced W L X‐rays intensity ratios: part I, Si(Li) data and EDS high resolution insight

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PIXE analysis of multilayer targets

Cited by 10 publications

References 25 publications

Transition-Edge Sensors for Particle Induced X-ray Emission Measurements

Transition-Edge Sensors for Particle Induced X-ray Emission Measurements

Accurate Determination of Quantity of Material in Thin Films by Rutherford Backscattering Spectrometry

H+ and He2 + induced W L X‐rays intensity ratios: part I, Si(Li) data and EDS high resolution insight

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Product

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H⁺ and He^2 + induced W L X‐rays intensity ratios: part I, Si(Li) data and EDS high resolution insight