Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer

Chen, Chao‐Jung; Pan, S.P.; Chang, Liang-Chih

doi:10.4028/www.scientific.net/kem.295-296.89

KEM

2005

DOI: 10.4028/www.scientific.net/kem.295-296.89

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Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer

Chao‐Jung Chen

S.P. Pan²,

Liang-Chih Chang³

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Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer

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