Pinning Voltage Control of CMOS Image Sensor by Measuring Sheet Resistance at Micro Test Structure in Scribe Line

Yamaguchi, Tadashi; Matsuura, M.; Iizuka, Koji

doi:10.23919/iwjt.2017.7966520

2017 17th International Workshop on Junction Technology (IWJT) 2017

DOI: 10.23919/iwjt.2017.7966520

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Pinning Voltage Control of CMOS Image Sensor by Measuring Sheet Resistance at Micro Test Structure in Scribe Line

Tadashi Yamaguchi

M. Matsuura

Koji Iizuka

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Pinning Voltage Control of CMOS Image Sensor by Measuring Sheet Resistance at Micro Test Structure in Scribe Line

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