Piezoresistive SU-8 Cantilever With Fe(III)Porphyrin Coating for CO Sensing

Reddy, C. Venkateshwar; Khaderbad, Mrunal A.; Gandhi, Sahir; Kandpal, Manoj; Patil, Sushil D.; Chetty, K. N.; Rajulu, K. Govinda; Chary, P. C. K.; Ravikanth, Mangalampalli; Rao, V. Ramgopal

doi:10.1109/tnano.2012.2190619

Cited by 32 publications

(17 citation statements)

References 25 publications

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“…This polymer is readily available in market SU-8 is a commonly used epoxy-based negative photoresist and very much sensitive to moisture 34,35 3 PFSI PFSI incorporates phosphoric acid that improves sensitivity of the film for moisture measurement…”

Section: Polymers For Ph Measurementmentioning

confidence: 99%

Review of polymer-based sensors for agriculture-related applications

Palaparthy¹,

Baghini²,

Singh³

2013

Emerging Materials Research

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Advancements in micro-electro-mechanical system (MEMS) and nano-electro-mechanical system (NEMS) technologies IntroductionIn agriculture, soil plays an important role in the overall yield of crop production. Although it is expected to enhance the yield by applying fertilizers, lack or excess levels of soil nutrients should be monitored. In general, for optimal control of soil conditions, it is necessary to measure nutrient content, moisture and pH levels, air humidity, temperature and composition of the soil at regular intervals. It is important to test the soil parameters to determine fertility, expected growth potential of the soil and measure nutrient deficiencies. 'pH' level is a measure of the acidity or basicity of the soil. Soil temperature influences crop growth since seeds, plant roots and microorganisms within the soil will not survive below some threshold temperature. Knowledge of soil humidity is important because it affects water-related reactions in the plants such as photosynthesis, pollination and even occurrence of plant diseases.1 Soil monitoring will also be useful for providing the basis for productions from soil such as food as well as controlling and regulating environmental interactions and sustaining biodiversity. Advancements in micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) as well as development of various chemical compounds has led to various methods and techniques for health monitoring and study of the soil. MEMS structures may be simple with no moving parts or be extremely complex with multiple moving elements under the control of integrated circuits. NEMS are next-generation MEMS devices, which are mainly in the nanometer scale. As a result, they are of low mass, high mechanical resonance frequencies, potentially large quantum mechanical effects such as zero-point motion, and a high surface-to-volume ratio that is useful for surface-based sensing mechanism.3 Figure 1 shows the structure of two commonly used MEMS structures: MEMS SU-8 polymer cantilever and MEMS microheater having suspended serpentine silicon beam as filament. 4,5 In this article, the authors present a review on reported polymers that are used for sensing various nutrients (which are also found in the soil) such as soil moisture, pH value and humidity. A polymer is

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Section: Polymers For Ph Measurementmentioning

confidence: 99%

Review of polymer-based sensors for agriculture-related applications

Palaparthy¹,

Baghini²,

Singh³

2013

Emerging Materials Research

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“…To enhance reliability, circuit designers need simple and accurate devices. Micro-cantilevers can be excited by any of the three common mechanisms-piezoelectric, electromagnetic and electrostatic transduction-depending on the specific requirement [16,17]. Electrothermal and magnetic actuation both offer the advantages of low control voltages and high contact force but draw high current and dissipate significant levels of power when actuated [18].…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of electrostatic micro-cantilever array as audible frequency generator

Arya

Khan

Lehana

2015

Journal of Electrostatics

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“…The versatility of SU8 is highlighted by the range of applications for which it can be used. For example sensors [3] and microlenses [4] have been fabricated out of SU8 as have templates for soft lithographic techniques [5,6] and functional surfaces displaying properties such as superhydrophobicity [2]. The inclusion of particles in SU8 can be done to impart greater functionality on the final structure, an example of this being the inclusion of SiO 2 particles in an SU8 matrix to increase wear resistance [7].…”

Section: Introductionmentioning

confidence: 99%

Lithographically fabricated SU8 composite structures for wettability control

Hamlett

McHale

Newton

2014

Surface and Coatings Technology

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SU8 is a negative resist which is widely used for the fabrication of micron scale lateral features over a wide range of heights using photolithographic methods. This has been extensively used as a method to produce surface structure to which hydrophobicity can be added and a model super-water repellent surface of achieved. However, such an approach requires at least two-steps and does not embed the desired properties as part of the structure itself or create multiple levels of topographical structure. In other applications, a variety of inclusions have previously been studied to tailor the properties of SU8. In this work we report an approach to, and results from, incorporating inclusions, in our case glass beads, of different wettabilities into the SU8 structures produced by photolithography. In particular, we focus on ridge structures expected to be of use in flow systems as drag reducing surfaces. We used scanning electron microscopy and profilometry to investigate how the inclusion of either hydrophobic or hydrophilic glass beads (sieve size of 20-30 μm) affects the definition of the structures formed and contact angle goniometry to define what effect such inclusions has on the wettability of the SU8 composite structure. It was found that the inclusion of hydrophobic glass beads in the SU8 resist resulted in poorly defined structures compared to both SU8 on its own and SU8 to which hydrophobic glass beads were added. In contrast, inclusion of hydrophilic glass beads resulted in a well-defined ridge structure with the majority of the beads located in the 'valleys'. Both EDX analysis and contact angle data indicated that the surface chemistry of the beads themselves (both the hydrophobic and hydrophilic beads) were masked by the SU8. Counter-intuitively, the inclusion of hydrophobic beads in the SU8 composite resin resulted in ridges with increased wettability, compared to SU8 ridges, as opposed to the inclusions of hydrophilic beads that resulted in surfaces with increased effective hydrophobicity .2

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Piezoresistive SU-8 Cantilever With Fe(III)Porphyrin Coating for CO Sensing

Cited by 32 publications

References 25 publications

Review of polymer-based sensors for agriculture-related applications

Review of polymer-based sensors for agriculture-related applications

Design and fabrication of electrostatic micro-cantilever array as audible frequency generator

Lithographically fabricated SU8 composite structures for wettability control

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