Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator

Computational and experimental analysis of droplet transportation/jetting behaviours driven by thin film surface acoustic waves

“…The interface based on is much |∇ϕ| smoother and sharper compared to that based on the volume fraction . Subsequently, the curvature at the interface and the surface tension force can be determined equation (11) and (12).…”

“…Applying a radio frequency (RF) signal to a set of interdigital transducers (IDT) made on a piezoelectric material can generate surface acoustic waves (SAWs). Constructive interference occurs while the frequency of the RF signal, , is set equal to (where is the sound velocity of substrate ate and λ is the distance between two fingers of IDT, and thus SAWs are generated and travel on the surface of the piezoelectric material [10,11]. SAW can manipulate a sessile droplet located on a piezoelectric substrate within its propagation path through fluid-SAW interactions [12].…”

On control of voltage-actuated piezoelectric beam: A Krasovskii passivity-based approach

“…Whereas the piezoelectric actuator can deflect in the longitudinal direction pz1q, the piezoelectric composite can deflect both longitudinally v and transversely w due to the shear stresses between the two layers. in acoustic devices [3] or suppression of vibrations in mechanical systems [4]. Shape control includes applications such as flexible wings [5], inflatable space structures [6], and deformable mirrors [7].…”

Graphene Surface Acoustic Wave Sensor for Simultaneous Detection of Charge and Mass

“…These electrodes consist of 10-nm-thick Ni and 30-nm-thick Au. In order to suppress the reflection of the SAW inside the IDT, a double electrode structure was employed . The period of the IDT was 32 μm and the width of the aperture was 850 μm.…”

“…In order to suppress the reflection of the SAW inside the IDT, a double electrode structure was employed. 53 The period of the IDT was 32 μm and the width of the aperture was 850 μm. The length of between electrodes formed on graphene was 200 μm and the width of electrode was 5 mm.…”