Piezoelectric sensors for investigations of microstructures

Kiełczyński, P.; Pajewski, W.; Szalewski, M.

doi:10.1016/s0924-4247(98)80003-4

Cited by 20 publications

(11 citation statements)

References 18 publications

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“…The cantilever that is often used as the model for analyzing piezoelectric sensors and actuators (Kielczyn´ski et al, 1998;Kruusing, 2000), shown in Figure 1, is studied. The upper and lower surfaces of the beam are continuously adhered to electrodes.…”

Section: Basic Equations For Piezothermoelastic Materials Under Planementioning

confidence: 99%

“…In engineering applications, piezoelectric materials are usually designed as unimorph with one layer or bimorph with two layers, which are mechanically jointed by a glue layer (Kenji, 1997;Kielczyn´ski et al, 1998;Pritchard and Bowen, 2002;Hou and Chen, 2003). Sirohi and Chopra (2000b) gave a detailed discussion on strain measurements from piezoceramic (PZT) and piezo-film (PVDF) sensors and compared them with strains from a conventional foil strain gage.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Exact Solutions of Functionally Gradient Piezothermoelastic Cantilevers and Parameter Identification

Chen

Shi

2005

Journal of Intelligent Material Systems and Structures

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Based on the theory of elasticity, some exact solutions of functionally gradient piezothermoelastic cantilevers under different coupled loadings are obtained. As an application, these solutions have been successfully used to identify the gradient piezoelectric parameter and the thermal material coefficients. Besides, some numerical results have been carried out for the cantilever under two different kinds of loadings. It is found that the tip deflection of the cantilever agrees very well with the experimental and theoretical findings provided by other investigations. The present study also shows that the linear change of thermal material parameters does not influence the distribution of the stress and induction of the cantilever. But it influences the components of strain and electric field strength as well as the displacement and electric potential of the cantilever.

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Section: Basic Equations For Piezothermoelastic Materials Under Planementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Exact Solutions of Functionally Gradient Piezothermoelastic Cantilevers and Parameter Identification

Chen

Shi

2005

Journal of Intelligent Material Systems and Structures

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“…Based on one-dimensional (1D) piezoelectric equations, Smits et al (1991) gave the constituent equations for the bimorph cantilevers subjected to an external force. Kielczynski et al (1998) studied the sensitivity and compliance for a modified piezoelectric bimorph sensor based on the layered beam theory. For a bi-metallic cantilever micro-actuator, Chu et al (1993) presented a model of the electromechanical performance and an analytical expression for the tip deflection and blocking force of the beam as a function of temperature change.…”

Section: Introductionmentioning

confidence: 99%

Solution modification of a piezoelectric bimorph cantilever under loads

Shi

Yao

2014

Journal of Intelligent Material Systems and Structures

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Most of the previous investigations on the static performances of piezoelectric bimorph cantilevers are based on the elementary theory of piezo-elasticity. In fact, one fundamental problem has not been solved yet from the view of the theory of piezo-elasticity, that is, a piezoelectric bimorph cantilever covered fully with electrodes on the upper and lower surfaces and subjected to a transversely concentrated load at the free end of the beam. The major obstacle to find the solution is the equipotential conditions on both the upper and lower surfaces of the cantilever. In this article, by establishing suitable boundary conditions and introducing an appropriate Airy stress function, the analytical solutions of a piezoelectric bimorph cantilever under three different loading conditions have been obtained. Numerical analysis is also conducted and the results are consistent with the present theoretical predictions. This investigation amends the corresponding works given by other investigations based on the elementary theory. It is found that the amendments to the end deflections of a PZT-4 piezoelectric bimorph cantilever caused by an end shear force, an end moment, or a voltage difference between the upper and lower surfaces are about 10.46%, 12.78%, and 3.52%, respectively. In addition, it is also found that these amendments depend just on the material parameters, have nothing to do with the geometric parameters of the bimorph cantilever. The Airy stress function proposed in this article can also be used to study other different piezoelectric cantilevers including multilayer piezoelectric cantilevers under corresponding loads.

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“…Piezoelectric materials are widely used in microengineering applications as either actuators in which displacement occurs in response to the application of an initial electric potential or sensors which generate electrical potential with the effect of a mechanical load [1]. Mechanical and electrical fields of flat bi-morph [1][2][3], multi-morph [4], and functionally graded [5,6] sensors and actuators were investigated by several researchers.…”

Section: Introductionmentioning

confidence: 99%

“…Mechanical and electrical fields of flat bi-morph [1][2][3], multi-morph [4], and functionally graded [5,6] sensors and actuators were investigated by several researchers. Moreover, deformation and electrical behaviors of the curved actuators were also studied (e.g., in [7,8]).…”

Section: Introductionmentioning

confidence: 99%