2007
DOI: 10.1016/j.materresbull.2006.08.014
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Piezoelectric properties of Bi4Ti3O12 thin films annealed in different atmospheres

Abstract: Bismuth titanate (Bi 4 Ti 3 O 12 -BIT) films were evaluated for use as lead-free piezoelectric thin-films in micro-electromechanical systems. The films were grown by the polymeric precursor method on Pt/Ti/SiO 2 /Si (1 0 0) (Pt) bottom electrodes at 700 8C for 2 h in static air and oxygen atmospheres. The domain structure was investigated by piezoresponse force microscopy (PFM). Annealing in static air leads to better ferroelectric properties, higher remanent polarization, lower drive voltages and higher piezo… Show more

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Cited by 16 publications
(5 citation statements)
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“…For practical applications, the films are preferred to be less conductive. As previously verified in early work of our group [35], the oxygen vacancies concentration is affected by the annealing atmosphere. The thermal treatment in oxidant atmosphere in materials with p-type conductivity increases defects as Bi or Ti vacancies.…”
Section: Resultssupporting
confidence: 78%
“…For practical applications, the films are preferred to be less conductive. As previously verified in early work of our group [35], the oxygen vacancies concentration is affected by the annealing atmosphere. The thermal treatment in oxidant atmosphere in materials with p-type conductivity increases defects as Bi or Ti vacancies.…”
Section: Resultssupporting
confidence: 78%
“…Furthermore, it has often been discussed that these "defects" can then trap carriers and become p-or n-type centers. [5][6][7][8]22 For instance, the surfaces of FE thin films are highly susceptible to creation of oxygen vacancies during processing and an electrode-FE film interface is often thought to be forming a Schottky contact and a commensurate depletion layer. While the effect of the internal electric fields due to surfaces, structural variations, and trapped charges, and other defect microstructures on the properties of FEs is well-understood, theoretical studies of the imprint phenomenon have focused on charge injection and frozen average electrostatic fields.…”
Section: Introductionmentioning
confidence: 99%
“…), film thickness, and testing conditions. [155][156][157][158] It is because of the numerous influencing factors that there are many ways to improve the ferroelectricity of perovskite ferroelectric oxide films. Recently, Cho et al [159] added 25% BiFeO 3 (BFO) to SrTiO 3 (STO) and BaTiO 3 (BTO), respectively, to form BFO25-BTO75 and BFO25-STO75 solid solution films, and compared with undoped BTO100 film.…”
Section: Improved Ferroelectric Properties By Alloyingmentioning
confidence: 99%
“…), film thickness, and testing conditions. [ 155–158 ] It is because of the numerous influencing factors that there are many ways to improve the ferroelectricity of perovskite ferroelectric oxide films. Recently, Cho et al.…”
Section: Fundamental Physical Properties and Applications Of Perovski...mentioning
confidence: 99%