Piezoelectric pressure sensor based on flexible gallium nitride thin film for harsh-environment and high-temperature applications

Kim, Nam‐In; Chang, Yu-Li; Chen, Jie; Barbee, T.W.; Wang, Weijie; Kim, Ja-Yeon; Kwon, Min‐Ki; Shervin, Shahab; Moradnia, Mina; Pouladi, Sara; Khatiwada, Devendra; Selvamanickam, V.; Ryou, Jae‐Hyun

doi:10.1016/j.sna.2020.111940

Cited by 67 publications

(31 citation statements)

References 37 publications

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“…However, considering the unique energy collection characteristics of the piezoelectric materials, they have very important advantages in the development of fast dynamic response, low energy consumption, and selfpowered flexible tactile sensors. The piezoelectric materials commonly used in piezoelectric sensors include lead zirconate titanate (PZT) [52][53][54][55][56] , ZnO [57] , BaTiO 3 [58] , LiTaO 3 [59,60] , Group III-nitride (III-N) materials (AlN and GaN) [61][62][63] , and intrinsic flexible polyvinylidene fluoride (PVDF) [64][65][66] .…”

Section: Piezoelectric Mechanismmentioning

confidence: 99%

Recent progress in flexible tactile sensor systems: from design to application

Zhu¹,

Zhou²,

Zhang³

2021

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With the rapid development of artificial intelligence, human-machine interaction, and healthcare systems, flexible tactile sensors have huge market potentials and research needs, so that both fundamental research and application demonstrations are evolving rapidly to push the potential to reality. In this review, we briefly summarize the recent progress of the flexible tactile sensor system, including the common sensing mechanisms, the important performance evaluation parameters, the device design trend, and the main applications. Moreover, the current device design trend towards flexible tactile sensor systems is discussed, including novel structures for outstanding performance, sensor arrays for large-area information acquisition, multi-mode information acquisition, and integration of tactile sensors with transistors. Various emerging applications enabled with these sensors are also exemplified in this review to show the potentials of the tactile sensors. Finally, we also discuss the technical demands and the future perspectives of flexible tactile sensor systems.

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Section: Piezoelectric Mechanismmentioning

confidence: 99%

Recent progress in flexible tactile sensor systems: from design to application

Zhu¹,

Zhou²,

Zhang³

2021

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“…Сенсор виготовляють, наносячи тонку п'єзоелектричну плівку (BaTiO 3 , PVDF, P(VDF-TrFE), GaPO 4 , SiC, GaN тощо, -залежно від призначення) на поверхню гнучкої підкладки (PI [39], ультратонкий кремній [2] тощо). Електроди можуть бути нанесені як з обох сторін чутливого шару [2,18,23,40], так і з однієї як ЗШГ [39]. Також під час виготовлення електродів як матриці можна отримати сенсор, який визначає локалізацію прикладання механічної сили до сенсора [41].…”

Section: гнучкі сенсори температуриunclassified

Flexible and Biodegradable Sensors: Materials, Manufacturing Technology and Devices on Its Basis

Lapshuda¹,

Koval²

2021

KPI SN

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Background. Currently, there is a significant number of technologies and materials in the world that are used to manufacture flexible electronics devices. Therefore, a review of various technologies and materials for the manufacture of flexible sensors, which would not be inferior in terms of sensitivity to their solid-state counterparts, is in demand. In addition, most modern flexible electronics technologies are based on the use of artificial polymers, the production of which pollutes the environment and which need to be disposed of at the end of its service life. Therefore, there is an urgent need to find an alternative to artificial polymers, environmentally friendly material. Objective. The purpose of the paper is to determine design and technological features of manufacturing and application of flexible and biodegradable electronic sensors. Methods. The article analyses, classifies and compares different technologies and materials for the manufacture of flexible sensors, which would not be inferior to their solid-state counterparts in terms of sensitivity. The technological features of synthesis and the main characteristics of flexible sensors made on the basis of artificial and biodegradable materials were also compared in the paper. Results. The design and technological features of manufacturing as well as application of flexible electronic sensors in comparison with their solid-state analogues were determined in the paper. Three groups of substrate materials that can be used for the synthesis of flexible sensors have been identified and their performance characteristics analysed. A comparison of different production techniques for flexible electronic sensors in terms of environmental friendliness, cost and manufacturability is carried out. Conclusions. The most promising biodegradable material, on the surface of which one can create a flexible sensor, is nanocellulose. Different types of printing are the most promising production technique for the manufacture of such devices, because they are cheap and can provide high productivity. Based on the obtained results, it is possible to improve the existing and develop new methods of creating flexible electronics devices that do not require recycling.

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“…Furthermore, with the help of wearable field sensor technology, it can further alert and monitor health conditions and improve diagnostic accuracy in the medical field. There are several types of pressure sensors on the market today, including capacitive sensors [1,2], resistive sensors [3,4], piezoelectric sensors [5,6], and piezoresistive sensors [7,8]. These sensors provide an electrical signal output proportional to the measured pressure.…”

Section: Introductionmentioning

confidence: 99%

Development of Flexible Biceps Tremors Sensing Chip of PVDF Fibers with Nano-Silver Particles by Near-Field Electrospinning

et al. 2022

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Polyvinylidene fluoride (PVDF) and AgNO3/PVDF composite piezoelectric fibers were prepared using near-field electrospinning technology. The prepared fibers are attached to the electrode sheet and encapsulated with polydimethylsiloxane to create an energy acquisition device and further fabricated into a dynamic sensing element. The addition of AgNO3 significantly increased the conductivity of the solution from 40.33 μS/cm to 883.59 μS/cm, which in turn made the fiber drawing condition smoother with the increase of high voltage electric field and reduced the fiber wire diameter size from 0.37 μm to 0.23 μm. The tapping test shows that the voltage signal can reach ~0.9 V at a frequency of 7 Hz, and the energy conversion efficiency is twice that of the PVDF output voltage. The addition of AgNO3 effectively enhances the molecular bonding ability, which effectively increases the piezoelectric constants of PVDF piezoelectric fibers. When the human body is exercised for a long period of time and the body is overloaded, the biceps muscle is found to produce 8 to 16 tremors/second through five arm flexion movements. The voltage output of the flexible dynamic soft sensor is between 0.7–0.9 V and shows an orderly alternating current waveform of voltage signals. The sensor can be used to detect muscle tremors after high-intensity training and to obtain advance information about changes in the symptoms of fasciculation, allowing for more accurate diagnosis and treatment.

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Piezoelectric pressure sensor based on flexible gallium nitride thin film for harsh-environment and high-temperature applications

Cited by 67 publications

References 37 publications

Recent progress in flexible tactile sensor systems: from design to application

Recent progress in flexible tactile sensor systems: from design to application

Flexible and Biodegradable Sensors: Materials, Manufacturing Technology and Devices on Its Basis

Development of Flexible Biceps Tremors Sensing Chip of PVDF Fibers with Nano-Silver Particles by Near-Field Electrospinning

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