Piezoelectric-on-Silicon MEMS Lorentz Force Lateral Field Magnetometers

Ghosh, Sagnik; Lee, Joshua

doi:10.1109/tuffc.2019.2903122

Cited by 8 publications

(12 citation statements)

References 29 publications

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“…Equation ( 13) indicates that the TCF can be approximated as a constant for a given structure since S Si , k Si-AlN , and k Si-SiO 2 are all determined just by material properties and physical dimensions as shown in equations ( 6), (8), and (11). Also, it can be seen from equation ( 13) that either increasing the length (L Si ) or reducing the thickness (T Si ) of the tine can improve TCF.…”

Section: Theoretical Analysismentioning

confidence: 99%

“…However, conventional piezoelectric resonant sensors based solely on piezoelectric films have problems of low-quality factor (Q) and low power handling capability. To relieve these problems, Thin-film Piezoelectric-on-Substrate (TPoS) resonators composed of a piezoelectric film and underneath substrate layer have been proposed and gained widespread interest [6][7][8][9][10][11]. TPoS resonators combine the benefits of large transduction efficiency in piezoelectric thin films (such as AlN, PZT, and ZnO) and low acoustic loss in substrate materials (such as single crystal silicon, silica, and diamond), which ultimately results in low motional resistances and large Qs.…”

Section: Introductionmentioning

confidence: 99%

“…Also, it has been reported that the power handling capability of TPoS resonators can be improved by increasing the thickness ratio of the substrate layer to the piezoelectric film [12]. All these advantages make the TPoS resonator a promising sensing unit in various sensor applications, such as mass sensor [6], inertial sensor [7], magnetometer [8], temperature sensor [9], humidity sensor [10], and liquid sensor [11].…”

Section: Introductionmentioning

confidence: 99%

“…TPoS resonators combine the benefits of large transduction efficiency in piezoelectric thin films (such as AlN, PZT, and ZnO) and low acoustic loss in substrate materials (such as single crystal silicon, silica, and diamond), which ultimately results in low motional resistances and large Q s. Also, it has been reported that the power handling capability of TPoS resonators can be improved by increasing the thickness ratio of the substrate layer to the piezoelectric film [ 12 ]. All these advantages make the TPoS resonator a promising sensing unit in various sensor applications, such as mass sensor [ 6 ], inertial sensor [ 7 ], magnetometer [ 8 ], temperature sensor [ 9 ], humidity sensor [ 10 ], and liquid sensor [ 11 ].…”

Section: Introductionmentioning

confidence: 99%

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Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Yang

Zhang³

et al. 2022

Research

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This paper reports a type of highly sensitive temperature sensor utilizing AlN-on-Si resonators with coupled-beam structures of double- and triple-ended-tuning-fork (D/TETF). For both resonators, the out-of-plane flexural mode is adopted as it favors the effect of thermal mismatch between the composite layers inherent to the AlN-on-Si structure and thus helps attain a large temperature coefficient of resonant frequency (TCF). The analytical model to calculate TCF values of D/TETF AlN-on-Si resonators is provided, which agrees well with the finite-element simulation and experimental results. The resonant temperature sensor is built by closing the loop of the AlN-on-Si resonator, a transimpedance amplifier, a low-pass filter, and a phase shifter to form an oscillator, the output frequency of which shifts proportionally to the ambient temperature. The measured sensitivities of the temperature sensors using D/TETF resonators are better than -1000 ppm/°C in the temperature range of 25°C~60°C, showing great potential to fulfill the on-chip temperature compensation scheme for cofabricated sensors.

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Section: Theoretical Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Yang

Zhang³

et al. 2022

Research

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show abstract

“…Some research studies dealing with MEMS-based resonance sensors have indicated that they employ the thermal actuator due to its large actuation force [8], simple fabrication [9], and flexibility in the choice of materials [10]. Furthermore, piezoresistive-based sensing is also typically used in MEMS sensors besides capacitive [11], piezoelectric [12] or optical transducers [13]. Piezoresistors are the simplest form of piezoresistive devices with several advantages: low cost, small size, low phase lag, and extensive dynamic range [14].…”

Section: Introductionmentioning

confidence: 99%

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

Setiono

Fahrbach

Deutschinger³

et al. 2021

Sensors

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An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing, e.g., high sensitivity, low cost, simple procedure, and quick response. However, a crosstalk effect is generated by the coupling of parasitic elements from the actuation part to the sensing part. This study presents a parasitic feedthrough subtraction (PFS) method to mitigate a crosstalk effect in an electrothermal piezoresistive cantilever (EPC) resonance sensor. The PFS method is employed to identify a resonance phase that is, furthermore, deployed to a phase-locked loop (PLL)-based system to track and lock the resonance frequency of the EPC sensor under cigarette smoke exposure. The performance of the EPC sensor is further evaluated and compared to an AFM-microcantilever sensor and a commercial particle counter (DC1100-PRO). The particle mass–concentration measurement result generated from cigarette-smoke puffs shows a good agreement between these three detectors.

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Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator

Tu,

Ou-Yang,

et al. 2024

Microsyst Nanoeng

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This work presents a single-structure 3-axis Lorentz force magnetometer (LFM) based on an AlN-on-Si MEMS resonator. The operation of the proposed LFM relies on the flexible manipulation of applied excitation currents in different directions and frequencies, enabling the effective actuation of two mechanical vibration modes in a single device for magnetic field measurements in three axes. Specifically, the excited out-of-plane drum-like mode at 277 kHz is used for measuring the x- and y-axis magnetic fields, while the in-plane square-extensional mode at 5.4 MHz is used for measuring the z-axis magnetic field. The different configurations of applied excitation currents ensure good cross-interference immunity among the three axes. Compared to conventional capacitive LFMs, the proposed piezoelectric LFM utilizes strong electromechanical coupling from the AlN layer, which allows it to operate at ambient pressure with a high sensitivity. To understand and analyze the measured results, a novel equivalent circuit model for the proposed LFM is also reported in this work, which serves to separate the effect of Lorentz force from the unwanted capacitive feedthrough. The demonstrated 3-axis LFM exhibits measured magnetic responsivities of 1.74 ppm/mT, 1.83 ppm/mT and 6.75 ppm/mT in the x-, y- and z-axes, respectively, which are comparable to their capacitive counterparts.

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Piezoelectric-on-Silicon MEMS Lorentz Force Lateral Field Magnetometers

Cited by 8 publications

References 29 publications

Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator

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