Piezoelectric-on-silicon Lorentz force magnetometers based on radial contour mode disk resonators

Ghosh, Sagnik; Lee, Joshua

doi:10.1016/j.sna.2018.09.009

Cited by 10 publications

(11 citation statements)

References 25 publications

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“…Similarly, piezoelectric MEMS sensors that use changes in stress or strain as the main sensing mechanism also include flow sensors [97], strain sensors [98] and magnetometers [99], etc. Ghosh et al realized the detection of the out-of-plane magnetic fields through the response of AlN piezoelectric disk resonator to the Lorenz force [100], as illustrated in figure 3(d). This disk resonator with a piezoelectricon-silicon structure works in a radial contour mode to for higher coupling efficiency, resulting in higher responsivity.…”

Section: Contact Sensorsmentioning

confidence: 99%

“…Reprinted from [96], Copyright (2015), with the permission from AIP Publishing. (d) A Lorentz force magnetometer based on radial contour mode disk resonator [100]. Reprinted from [100], Copyright (2018), with the permission from Elsevier.…”

Section: Contact Sensorsmentioning

confidence: 99%

“…(d) A Lorentz force magnetometer based on radial contour mode disk resonator [100]. Reprinted from [100], Copyright (2018), with the permission from Elsevier. infrared detection with enhanced infrared absorption performance by designing plasmonic metasurfaces on its surface, which was demonstrated by Hui et al [105].…”

Section: Contact Sensorsmentioning

confidence: 99%

“…(d) A Lorentz force magnetometer based on radial contour mode disk resonator[100]. Reprinted from[100], Copyright (2018), with the permission from Elsevier.…”

mentioning

confidence: 99%

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Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

Shi

Vachon

et al. 2021

J. Micromech. Microeng.

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The rapid development of the fifth-generation mobile networks (5G) and Internet of Things (IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and actuators. Piezoelectric micro-electromechanical system (MEMS) devices, fabricated by micromachining technologies, provide a versatile platform for various high-performance sensors, actuators, energy harvesters, filters and oscillators (main building blocks in radio frequency (RF) front-ends for wireless communication). In this paper, we provide a comprehensive review of the working mechanism, structural design, and diversified applications of piezoelectric MEMS devices. Firstly, various piezoelectric MEMS sensors are introduced, including contact and non-contact types, aiming for the applications in physical, chemical and biological sensing. This is followed by a presentation of the advances in piezoelectric MEMS actuators for different application scenarios. Meanwhile, piezoelectric MEMS energy harvesters, with the ability to power other MEMS devices, are orderly enumerated. Furthermore, as a representative of piezoelectric resonators, Lamb wave resonators are exhibited with manifold performance improvements. Finally, the development trends of wearable and implantable piezoelectric MEMS devices are discussed.

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Section: Contact Sensorsmentioning

confidence: 99%

Section: Contact Sensorsmentioning

confidence: 99%

Section: Contact Sensorsmentioning

confidence: 99%

“…(d) A Lorentz force magnetometer based on radial contour mode disk resonator[100]. Reprinted from[100], Copyright (2018), with the permission from Elsevier.…”

mentioning

confidence: 99%

See 2 more Smart Citations

Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

Shi

Vachon

et al. 2021

J. Micromech. Microeng.

View full text Add to dashboard Cite

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“…As a keystone for the realization of the Internet of Things (IoT), these MEMS resonator devices have been extensively developed for implementation in a wide range of application fields due to a much higher quality factor (Q)-compared to electrical resonators (e.g., LC tank circuits)-smaller size, and lower power cost. These applications have included frequency synthesis and frequency selection in modern portable wireless communication systems, as well as a whole host of sensors that are based on the principle of modulating mechanical resonance [1][2][3][4][5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression

Zhang

Bao

et al. 2020

Micromachines

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As one of the core components of MEMS (i.e., micro-electro-mechanical systems), thin-film piezoelectric-on-silicon (TPoS) resonators experienced a blooming development in the past decades due to unique features such as a remarkable capability of integration for attractive applications of system-on-chip integrated timing references. However, the parasitic capacitive feedthrough poses a great challenge to electrical detection of resonance in a microscale silicon-based mechanical resonator. Herein, a fully-differential configuration of a TPoS MEMS resonator based on a novel structural design of dual interdigital electrodes is proposed to eliminate the negative effect of feedthrough. The fundamental principle of feedthrough suppression was comprehensively investigated by using FEA (i.e., finite-element analysis) modeling and electrical measurements of fabricated devices. It was shown that with the help of fully-differential configuration, the key parameter of SBR (i.e., signal-to-background ratio) was significantly enhanced by greatly suppressing the in-phase signal. The S-parameter measurement results further verified the effectiveness of this novel feedthrough suppression strategy, and the insertion loss and SBR of proposed TPoS resonators were improved to 4.27 dB and 42.47 dB, respectively.

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Analysis and experimental verification of dual frequency ultrasonic transducer with contour and thickness vibration modes

Shao

Han

et al. 2022

Applied Acoustics

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Piezoelectric-on-silicon Lorentz force magnetometers based on radial contour mode disk resonators

Cited by 10 publications

References 25 publications

Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression

Analysis and experimental verification of dual frequency ultrasonic transducer with contour and thickness vibration modes

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