Piezoelectric micromachined ultrasonic transducers: modeling the influence of structural parameters on device performance

Akasheh, Firas; Fraser, John D.; Bose, Susmita; Bandyopadhyay, Amit

doi:10.1109/tuffc.2005.1417268

Cited by 58 publications

(34 citation statements)

References 29 publications

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“…Despite achievements in pMUT research [1], [3], [4], [12]- [18], predictive modeling and optimization capabilities are limited in improving reduced effective electromechanical coupling k 2 ef f and bandwidth in fabricated devices. In the most mature recent projects, fabricated pMUT designs are based heavily on geometry specific finite element models [19] with analytical models commonly limited to resonant frequency determination [4], [16], [20], [21]. A lack of available models leading to performance shortcomings demonstrate a need for more robust, fundamental understanding of pMUT performance.…”

Section: Introductionmentioning

confidence: 99%

Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers

Smyth

Kim

2015

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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An analytical Mason equivalent circuit is derived for a circular, clamped plate piezoelectric micro-machined ultrasonic transducer (pMUT) design in 31 mode considering an arbitrary electrode configuration at any axisymmetric vibration mode. The explicit definition of lumped parameters based entirely on geometry, material properties and defined constants enables straightforward and wide ranging model implementation for future pMUT design and optimization. Beyond pMUTs, the acoustic impedance model is developed for universal application to any clamped, circular plate system and operating regimes including relevant simplifications are identified via the wave number-radius product ka. For the single electrode fundamental vibration mode case, sol-gel P b (Zr0.52) T i0.48O3 (PZT) pMUT cells are micro-fabricated with varying electrode size to confirm the derived circuit model with electrical impedance measurements. For the first time, experiment and finite element simulation results are successfully applied to validate extensive electrical, mechanical and acoustic analytical modeling of a pMUT cell for wide ranging applications including medical ultrasound, non-destructive testing, and range finding.

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Section: Introductionmentioning

confidence: 99%

Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers

Smyth

Kim

2015

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…Basic pMUT structure was usually formed by a layer of piezo active layer sandwiched between two electrodes. However, the present of additional layer forming a diaphragm seems to be essential for stronger structure and improved bandwidth [4][5].Piezo active layer is the key in sensing mechanism where the electrostriction process occur [6]. This work utilized zinc oxide (ZnO) as piezo active material.…”

Section: Introductionmentioning

confidence: 99%

“…Manipulating structural parameters to obtain desired performance have been successfully demonstrated elsewhere for rectangular shaped pMUT. Besides resonance frequency, electromechanical coupling coefficient and acoustic impedance have been proven to be affected by structural parameter changes [4][5][6]. Furthermore, top electrode diameter of pMUT also found to give an effect on maximum diaphragm deflection [10].…”

Section: Introductionmentioning

confidence: 99%

Modeling and theoretical characterization of circular pMUT for immersion applications

Yaacob

Arshad

Manaf

2010

Oceans'10 Ieee Sydney

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Abstract-This paper reported modeling and theoretical characterization of circular piezoelectric micromachined ultrasonic transducer (pMUT) for immersion applications. Zinc oxide (ZnO) was employed as piezo active material and nickel aluminum bronze alloy UNS C63000 (CuAl 10 Ni 5 Fe 4 ) also known as 'sea bronze', was introduced as electrodes. First, virtual fabrication process was carried out within software environment to form a pMUT model. Then, resonance frequency of the model was finalized and fine tuned by manipulating its structural parameters which are diaphragm diameter and piezo active layer thickness. Next, receiving and transmitting responses were estimated using finite element approach through the combination of piezoelectric analysis and modal analysis. From these analyses, the pMUT model having a resonance frequency of 40.82 kHz was successfully modeled. Transmitting response was estimated at 137 dB (re 1 µPa/V) at 41 kHz on the surface of the transducer while the receiving response was estimated at -93 dB (re 1 V/µPa) at 38 kHz of frequency. Virtual fabrication process and finite element analysis for model performances estimation have proved to reduce the development time. From the comparison made, the usage of sea bronze and ZnO film replacing conventional gold, platinum and lead zirconate titanate (PZT) were proven to deliver exceptional performances with better durability. However, device fabrication is essential in order to validate the findings and this will be included in our future works. Furthermore, the model needs to be extended so that the value of acoustic impedance within the device can be estimated.

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“…cMUTs use a capacitive film, while pMUTs use a piezoelectrically actuated membrane to operate the device. Since its advent, these two working principles have kept competing with each other as the piezoelectric transducers [5,6,12] and the capacitive transducers [7][8][9]. The main thrust for this work is to understand design parameters for pMUTs with inherently higher bandwidth, sensitivity and quality factor to achieve higher device efficiency.…”

Section: Introductionmentioning

confidence: 99%

“…Improvement in pMUTs performance can be achieved through optimization in material and design variables. Research work focusing on material optimization [11] and FEA analysis [12] reported previously by our group has helped us to narrow down different design parameters. The present work is focused on optimization of top electrode design.…”

Section: Introductionmentioning

confidence: 99%

Influence of top electrode design on pMUTs performance

Choi¹,

Dalakoti²,

Bose³

et al. 2007

Sensors and Actuators A: Physical

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Piezoelectric micromachined ultrasonic transducers: modeling the influence of structural parameters on device performance

Cited by 58 publications

References 29 publications

Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers

Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers

Modeling and theoretical characterization of circular pMUT for immersion applications

Influence of top electrode design on pMUTs performance

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