Piezoelectric Micromachined Ultrasonic Transducers based on PZT films

Belgacem,; Calame,; Muralt,

doi:10.1109/isaf.2006.4349279

Cited by 4 publications

(2 citation statements)

References 11 publications

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“…Compared with the pMUT of conventional structure [ 27 ], the electromechanical conversion factor improves about 1.2-fold, while the DC vibration amplitude improves almost twofold.…”

Section: Theory and Modelingmentioning

confidence: 99%

ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing

et al. 2023

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Piezoelectric micromechanical ultrasonic transducers (pMUTs) are new types of distance sensors with great potential for applications in automotive, unmanned aerial vehicle, robotics, and smart homes. However, previously reported pMUTs are limited by a short sensing distance due to lower output sound pressure. In this work, a pMUT with a special dual-ring structure based on scandium-doped aluminum nitride (ScAlN) is proposed. The combination of a dual-ring structure with pinned boundary conditions and a high piezoelectric performance ScAlN film allows the pMUT to achieve a large dynamic displacement of 2.87 μm/V and a high electromechanical coupling coefficient (kt2) of 8.92%. The results of ranging experiments show that a single pMUT achieves a distance sensing of 6 m at a resonant frequency of 91 kHz, the farthest distance sensing registered to date. This pMUT provides surprisingly fertile ground for various distance sensing applications.

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“…Compared with the pMUT of conventional structure [ 27 ], the electromechanical conversion factor improves about 1.2-fold, while the DC vibration amplitude improves almost twofold.…”

Section: Theory and Modelingmentioning

confidence: 99%

ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing

et al. 2023

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show abstract

“…𝑒 31,𝑓 𝑧 𝑝 𝑈𝐼 𝑝𝑖𝑒𝑧𝑜 𝑘 1 +𝑘 2 (13) Compared with the pMUT of conventional structure 22 , the electromechanical conversion factor improves about 1.2 times, while the DC vibration amplitude improves almost twice.…”

Section: Equivalent Circuit Modelmentioning

confidence: 99%

ScAlN film-based piezoelectric micromechanical ultrasonic transducers with dual-ring structure for distance sensing

zhang

Miao

et al. 2022

Preprint

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Piezoelectric micromechanical ultrasonic transducers (pMUTs) are a new type of distance sensors with great potential for applications in automotive, unmanned aerial vehicle, robotics, and smart-home. However, the previously reported pMUT is limited by short sensing distance due to lower output sound pressure. In this work, a pMUT with a special dual-ring structure based on scandium-doped aluminum nitride (ScAlN) is proposed. The combination of a dual-ring structure with pinned boundary conditions and a high piezoelectric performance ScAlN film allows the pMUT to achieve a large dynamic displacement of 2.87 μm/V and a high electromechanical coupling coefficient (k2t) of 8.92%. The results of the ranging experiments show that the proposed pMUT achieves a 6 m distance sensing, the farthest distance sensing up to date registered. This pMUT provides surprisingly fertile ground for various distance sensing applications.

show abstract