Piezoelectric inchworm rotary actuator with high driving torque and self-locking ability

Song, Siyang; Shao, Shubao; Xu, Minglong; Shao, Yangfan; Tian, Zheng; Feng, Bo

doi:10.1016/j.sna.2018.08.048

Cited by 51 publications

(22 citation statements)

References 16 publications

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“…One of the longstanding issues with inchworm technology is that actuation of the brakes causes unintended motion of the moved element. This phenomenon has been reported and characterized by other researchers such as [6,[8][9][10]. The JPL FIA mechanism is no exception.…”

Section: Introductionsupporting

confidence: 74%

“…These PZTs are used to grasp and move a runner attached to the optic to be moved. By adjusting preload rods, each brake can be configured for either a power-off or power-on parked state, which is a feature that has not been seen in previous brake designs, such as those mentioned in [6,[8][9][10] which are all power-off brakes. The advantage of power-on brakes is that the holding force is generally greater than relying on the compliance of the mechanism to hold the actuator in place.…”

Section: Introductionmentioning

confidence: 99%

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Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Shields

2019

Actuators

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Inchworm actuators are innovative mechanisms that offer nanometer-level positioning coupled with extreme dynamic range. Because of this, they have found applications in optical instruments of various types including interferometers, segmented reflectors, and coronagraphs. In this paper, we present two prototypes of flight-qualifiable inchworm actuators developed at the Jet Propulsion Laboratory. These actuators have two sets of brake piezoceramic (PZT) stacks and an extension PZT stack used for mobility. By proper phasing of the signals to these PZTs, a walking gait can be achieved that moves a runner attached via a flexure to the optic to be moved. A model of these devices, based on first principles, is developed as well as an estimation and control scheme for precise positioning. The estimator estimates physical parameters of the device as well as a self-induced motion disturbance caused by the brakes. Simulations and test data are presented that demonstrate nanometer-level positioning precision as well as the cause of variations in the brake-induced disturbance.

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Section: Introductionsupporting

confidence: 74%

Section: Introductionmentioning

confidence: 99%

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Shields

2019

Actuators

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“…However, for the motor design, the relationship between the specifications of the PM (i.e., type and size) and precision motor performance (i.e., driving force and travel) is what professional developers want to know most. The above cases also appear in References [ 15 , 16 , 17 , 18 , 19 ]. In view of the issues mentioned, a multi-physics field coupling simulation involving electrostatics and solid mechanics using FEM was established for direct PIM performance evaluation to assist the motor design and development under certain PM.…”

Section: Introductionmentioning

confidence: 83%

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

2020

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Ultra-precision piezoelectric inchworm motor (PIM) is widely used as optical equipment, in the microelectronics semiconductor industry, and in precision manufacturing for motion and positioning, but the multi-physics field simulation model for PIM performance estimation and assisting motor design is rarely studied. The simulation model in this paper aimed to provide researchers with direct and convenient PIM performance evaluation to assist the motor design and development. According to the existing advanced inchworm motor products, a multi-physics field coupling model involving solid mechanics and electrostatics using the finite element method (FEM) was established. The motion gesture and performance (driving force and travel) of the PIM were analyzed, respectively. The simulation results showed that the motion gesture of the inchworm motor was well consistent with that of the actual motor product. The driving force from the simulation was close to that of the actual product, and the maximum error was 2.8%. As for the PIM travel, there was a maximum travel error of 0.6 μm between the simulation and official data. The performance parameters of the piezoelectric materials under certain specifications can be simulated by the multi-physics field coupling model. Therefore, the multi-physics field coupling simulation model is suitable for PIM performance evaluation and assisting motor development.

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“…Using the inverse piezoelectric effect of piezoelectric materials, various piezoelectric actuators have been developed to meet the requirements of precision positioning. To achieve large-stroke movement, several stepping piezoelectric driving principles have been proposed, which can be classified by the working principles of inchworm actuators [6,7], stick-slip actuators [8,9], impact actuators [10,11], ultrasound actuators [12,13], and so on. Compared with other types of actuators, stick-slip piezoelectric actuators have the advantages of simple structure and convenient control; therefore, they have been widely investigated in recent years.…”

Section: Introductionmentioning

confidence: 99%

A Novel Rotation-Structure Based Stick-Slip Piezoelectric Actuator with High Consistency in Forward and Reverse Motions

et al. 2021

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Under the same driving voltage and frequency, the forward and reverse motion inconsistency of stick-slip piezoelectric actuators would bring difficulty for subsequent control. To solve this problem, a rotation-structure based piezoelectric actuator with completely symmetric structure and two driving feet was initially proposed. By testing its output performances under various driving voltages and frequencies, it was confirmed that, although similar speeds could be achieved for forward and reverse motions, the maximum displacement and backward displacement in each step were still quite different. By analyzing the reasons leading to this difference, this actuator was further improved by using only one driving foot. The experimental results showed that the forward and reverse motion consistency of the improved actuator had been significantly improved. The deviation rate was only 1.6%, corresponding to a travel distance of 118.7 μm, obtained under the driving voltage of 100 V and driving frequency of 10 Hz. The comparison with some previously reported actuators further confirmed the advancement of this improved actuator.

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Piezoelectric inchworm rotary actuator with high driving torque and self-locking ability

Cited by 51 publications

References 16 publications

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

A Novel Rotation-Structure Based Stick-Slip Piezoelectric Actuator with High Consistency in Forward and Reverse Motions

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