2020
DOI: 10.3390/plasma4010001
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Piezoelectric Direct Discharge: Devices and Applications

Abstract: The piezoelectric direct discharge (PDD) is a comparatively new type of atmospheric pressure gaseous discharge for production of cold plasma. The generation of such discharge is possible using the piezoelectric cold plasma generator (PCPG) which comprises the resonant piezoelectric transformer (RPT) with voltage transformation ratio of more than 1000, allowing for reaching the output voltage >10 kV at low input voltage, typically below 25 V. As ionization gas for the PDD, either air or various gas mixtures … Show more

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Cited by 35 publications
(34 citation statements)
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References 195 publications
(188 reference statements)
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“…In configuration E, a needle corona [ 46 ] was supplied with high voltage (HV) from the CeraPlas™F over a plasma bridge [ 47 ]. This HV causes an atmospheric air corona discharge on the tip of the needle electrode.…”
Section: Methodsmentioning
confidence: 99%
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“…In configuration E, a needle corona [ 46 ] was supplied with high voltage (HV) from the CeraPlas™F over a plasma bridge [ 47 ]. This HV causes an atmospheric air corona discharge on the tip of the needle electrode.…”
Section: Methodsmentioning
confidence: 99%
“…The configuration F, referred to as a plasma needle [ 48 ], consisted of the same needle electrode as in configuration E, but was operated in a gas flow of different gas mixtures [ 47 ]. In this study, the results obtained with argon as a plasma gas are presented.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The plasma focusing can be avoided by the application of a dielectric barrier discharge powered by the PDD. Different configurations of the PDD-powered DBDs are described in [17]. The DBD configuration used in this example is known in the literature as floating electrode dielectric barrier discharge (FE-DBD) [29,30].…”
Section: Precleaning Of 6-inch Silicon Wafersmentioning
confidence: 99%
“…Recently, the operation of piezoelectric direct discharge (PDD) [16,17] as an APPJ was characterized [18,19]. The resonant piezoelectric transformers (RPT) [20] used for generation of the PDD, can be used in arrays for the increase of the treatment area and speed.…”
Section: Introductionmentioning
confidence: 99%