Piezoelectric cantilever sensors with asymmetric anchor exhibit picogram sensitivity in liquids

Sharma, Harsh; Lakshmanan, Ramji S.; Johnson, Blake N.; Mutharasan, Raj

doi:10.1016/j.snb.2010.10.006

Cited by 41 publications

(37 citation statements)

References 29 publications

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“…13 in Table I. 15,21 The correlation of sensor response with liquid density (Fig. Responses of both bending and torsional modes in PEMC were larger than the longitudinal mode based on frequency shift, while Q-value persistence in high viscosity liquids was comparable.…”

mentioning

confidence: 97%

Persistence of bending and torsional modes in piezoelectric-excited millimeter-sized cantilever (PEMC) sensors in viscous liquids - 1 to 103 cP

Johnson

Mutharasan

2011

Journal of Applied Physics

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Articles you may be interested inExpression of picogram sensitive bending modes in piezoelectric cantilever sensors with nonuniform electric fields generated by asymmetric electrodes Rev. Sci. Instrum. 81, 125108 (2010); 10.1063/1.3518925 Longitudinal vibration mode of piezoelectric thick-film cantilever-based sensors in liquid media Appl. Phys. Lett. 96, 154102 (2010); 10.1063/1.3387753Length and thickness dependence of longitudinal flexural resonance frequency shifts of a piezoelectric microcantilever sensor due to Young's modulus change J. Appl. Phys.

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mentioning

confidence: 97%

Persistence of bending and torsional modes in piezoelectric-excited millimeter-sized cantilever (PEMC) sensors in viscous liquids - 1 to 103 cP

Johnson

Mutharasan

2011

Journal of Applied Physics

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“…Electromechanically-coupled eigenfrequency and frequency response simulations of the printed device were done as previously reported. 42, 43 All studies were performed using commercially available finite element analysis (FEA) software (COMSOL Multiphysics, Version 5.2a). A frequency domain analysis was conducted in 3D using the piezoelectric device interface, which enables the coupling of a solid mechanics problem using the Structural Mechanics module with an electrostatics problem using the AC/DC module.…”

Section: Methodsmentioning

confidence: 99%

“…Damping was modeled as an isotropic structure loss factor (η = 0.01). 42 The mechanical boundary conditions included a fixed constraint condition on all chip faces except the top and bottom faces. No initial deformation, stress, or external forces were applied.…”

Section: Methodsmentioning

confidence: 99%

Additive manufacturing of three-dimensional (3D) microfluidic-based microelectromechanical systems (MEMS) for acoustofluidic applications

et al. 2018

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Three-dimensional (3D) printing now enables the fabrication of 3D structural electronics and microfluidics. Further, conventional subtractive manufacturing processes for microelectromechanical systems (MEMS) relatively limit device structure to two dimensions and require post-processing steps for interface with microfluidics. Thus, the objective of this work is to create an additive manufacturing approach for fabrication of 3D microfluidic-based MEMS devices that enables 3D configurations of electromechanical systems and simultaneous integration of microfluidics. Here, we demonstrate the ability to fabricate microfluidic-based acoustofluidic devices that contain orthogonal out-of-plane piezoelectric sensors and actuators using additive manufacturing. The devices were fabricated using a microextrusion 3D printing system that contained integrated pick-and-place functionality. Additively assembled materials and components included 3D printed epoxy, polydimethylsiloxane (PDMS), silver nanoparticles, and eutectic gallium-indium as well as robotically embedded piezoelectric chips (lead zirconate titanate (PZT)). Electrical impedance spectroscopy and finite element modeling studies showed the embedded PZT chips exhibited multiple resonant modes of varying mode shape over the 0-20 MHz frequency range. Flow visualization studies using neutrally buoyant particles (diameter = 0.8-70 μm) confirmed the 3D printed devices generated bulk acoustic waves (BAWs) capable of size-selective manipulation, trapping, and separation of suspended particles in droplets and microchannels. Flow visualization studies in a continuous flow format showed suspended particles could be moved toward or away from the walls of microfluidic channels based on selective actuation of in-plane or out-of-plane PZT chips. This work suggests additive manufacturing potentially provides new opportunities for the design and fabrication of acoustofluidic and microfluidic devices.

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“…2D, the two trapping zones for the fundamental mode were slightly asymmetric arising from the asymmetric anchor which provides electrically observable impedance-coupled modes. 49 The trapping zone on the cantilever short side was slightly shifted towards the anchor. Movies S1 and S2 † show particle trapping begins with a seeding region and extends from the cantilever surface with time, ultimately resulting in multiple layers of trapped particles at steady state.…”

Section: Particle Trapping In Low-order Resonant Modesmentioning

confidence: 98%

Acoustofluidic particle trapping, manipulation, and release using dynamic-mode cantilever sensors

Johnson

Mutharasan

2017

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We show here that dynamic-mode cantilever sensors enable acoustofluidic fluid mixing and trapping of suspended particles as well as the rapid manipulation and release of trapped micro-particles via mode switching in liquid. Resonant modes of piezoelectric cantilever sensors over the 0 to 8 MHz frequency range are investigated. Sensor impedance response, flow visualization studies using dye and micro-particle tracers (100 μm diameter), and finite element simulations of cantilever modal mechanics and acoustic streaming show fluid mixing and particle trapping configurations depend on the resonant mode shape. We found trapped particles could be: (1) rapidly manipulated on millimeter length scales, and (2) released from the cantilever surface after trapping by switching between low- and high-order resonant modes (less than 250 kHz and greater than 1 MHz, respectively). Such results suggest a potentially promising future for dynamic-mode cantilevers in separations, pumping and mixing applications as well as acoustofluidic-enhanced sensing applications.

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Piezoelectric cantilever sensors with asymmetric anchor exhibit picogram sensitivity in liquids

Cited by 41 publications

References 29 publications

Persistence of bending and torsional modes in piezoelectric-excited millimeter-sized cantilever (PEMC) sensors in viscous liquids - 1 to 103 cP

Persistence of bending and torsional modes in piezoelectric-excited millimeter-sized cantilever (PEMC) sensors in viscous liquids - 1 to 103 cP

Additive manufacturing of three-dimensional (3D) microfluidic-based microelectromechanical systems (MEMS) for acoustofluidic applications

Acoustofluidic particle trapping, manipulation, and release using dynamic-mode cantilever sensors

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