Nanocystalline (Pb 0.76 Ca 0.24 )TiO 3 (PCT) thin films were grown on Pt/Ti/SiO 2 /Si(100) substrates by a modified sol-gel process. Randomly oriented tetragonal PCT thin films have been obtained. Atomic force microscopy reveals that the films are dense, have a smooth surface, and the grain size is about 40 nm for polycrystalline PCT film on a Pt/Ti/SiO 2 /Si(100) substrate annealed at 650 C by rapid thermal annealing. The electrical measurements were conducted on PCT films in metal-ferroelectric-metal (MFM) capacitor configuration. The results show that the film exhibited good ferroelectrity with remanent polarization and coercive electric field of 36 mC/cm 2 and 240 kV/cm, respectively. At 100 kHz, the dielectric constant and dielectric loss of the film are 295 and 0.027, respectively, for thin films of 200 nm thickness.