Piezoelectric aluminum nitride MEMS annular dual contour mode filter

Stephanou, P.J.; Piazza, Gianluca; White, Carolyn D.; Wijesundara, Muthu B. J.; Pisano, Albert P.

doi:10.1016/j.sna.2006.04.032

Cited by 31 publications

(19 citation statements)

References 6 publications

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“…Our attempt in this paper is to demonstrate the potential for the same acoustic coupling technique to be utilized in thin-film piezoelectric devices at high frequencies. A similar dual-mode coupling technique has been demonstrated in thin-film AlN annular structures at low frequencies (~22 MHz) [9]. The resonant structure in our work is a suspended rectangular stack of piezoelectric material (e.g.…”

Section: Introductionmentioning

confidence: 86%

High-frequency monolithic thin-film piezoelectric-on-substrate filters

Abdolvand

Ayazi

2009

Int. j. microw. wirel. technol.

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A class of micromachined acoustic filters is presented in which the number of individual resonant structures is reduced to 1 (monolithic filter). This resonant structure is comprised of a stack of thin-film piezoelectric-on-silicon. Symmetric and anti-symmetric resonance modes (dual modes) of the silicon structure are piezoelectrically excited and coupled to realize a 2-pole narrowband filter. High-order lateral bulk acoustic resonance modes of a rectangular plate are utilized to design dispersed-frequency UHF filters fabricated on a single substrate. Thickness mode filters are also realized at GHz frequencies using a new interdigitated electrode design. Additionally, it is shown that the filter bandwidth can be controlled by changing the dimensions of the resonant structure and the electrode pattern. Narrowband lateral mode filters with filter Q’s larger than 300 at ~440 MHz and thickness mode filters with filter Q’s in the range of 150–900 at ~3.1 GHz are demonstrated.

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Section: Introductionmentioning

confidence: 86%

High-frequency monolithic thin-film piezoelectric-on-substrate filters

Abdolvand

Ayazi

2009

Int. j. microw. wirel. technol.

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“…Compared to filter applications where close to 50 Ω impedance and high transadmittance at resonance are sought [12,13], the design criteria of modulators using dual-mode highimpedance resonators are opposite. Instead of maximally coupling the resonance modes to the IDTs, to design a dual-mode resonator with two equally high impedance points, the resonator cavity has to contain two modes with minimal coupling to both the input and output IDTs.…”

Section: Proposed Dual-mode Saw Resonatormentioning

confidence: 99%

A high-impedance dual-mode SAW resonator for ultra low power and high data rate FSK modulator

Zhu

Zheng

Sun

et al. 2014

Sensors and Actuators A: Physical

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“…Piezoelectric microresonators have been recently used in a large variety of applications [1][2][3][4][5][6][7][8][9], due to their tiny structures [10] and ultrahigh sensitivity [11], let alone their self-exciting and self-sensing capability, together with full integration, as compared to electrostatic [12], electromagnetic [13], or optically associated [14] structures. Regarding the piezoelectric materials, aluminum nitride (AlN) was selected in this work, to be compatible with complementary metal-oxide-semiconductor (CMOS) technology.…”

Section: Introductionmentioning

confidence: 99%

Hydrodynamic Loading on Vibrating Piezoelectric Microresonators

Qiu¹,

Seidel²

2018

Piezoelectricity - Organic and Inorganic Materials and Applications

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The dynamics of micro-piezoelectric resonators can be profoundly affected by immersion in fluids. Aluminum nitride-based piezoelectric microresonators are fabricated and tested under controlled pressures in several gases. The cases on microresonator vibrating in fluid can be broadly divided into: (i) those that deal with vibration in free space and (ii) close to a surface. For the first case, experimental and analytical results for the hydrodynamic loading characteristics of the resonators at different resonant modes have been investigated, as well as the influences of fluid viscosity and compressibility. For the second case, most prior efforts have been focused on squeeze-film damping with very narrow gaps, while in many practical applications, the resonators vibrate close to a surface with a moderate distance. Experiments by using a micro-bridge resonator with a big range of gaps are performed and compared with predictions from theoretical models.

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Piezoelectric aluminum nitride MEMS annular dual contour mode filter

Cited by 31 publications

References 6 publications

High-frequency monolithic thin-film piezoelectric-on-substrate filters

High-frequency monolithic thin-film piezoelectric-on-substrate filters

A high-impedance dual-mode SAW resonator for ultra low power and high data rate FSK modulator

Hydrodynamic Loading on Vibrating Piezoelectric Microresonators

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