Piezoelectric Actuated Glass Plate for Liquid Density and Viscosity Measurement

Abstract

This paper reports on a new system for liquid density and viscosity measurement based on a freely suspended rectangular vibrating plate actuated by piezoelectric ceramic (PZT) actuators. The Lamb mode used for these measurements allows us to infer both the density and viscosity in a larger range as compared to the existing gold-standard techniques of MEMS resonators. The combination of the measured resonance frequency and quality factor enables extraction of density and viscosity of the surrounding liquid. The system is calibrated while performing measurements in water glycerol solutions with a density range from 997 to 1264 kg/m3 and viscosity from 1.22 to 985 mPa·s, which is a larger dynamic range compared to existing mechanical resonators showing an upper limit of 700 mPa·s. The out-of-plane vibrating mode exhibits quality factor of 169, obtained in deionized water (1.22 mPa·s viscosity), and 93 for pure glycerol with a viscosity of 985 mPa·s. This Lamb wave resonating sensor can achieve measurement in fairly large viscosity media while keeping a quality factor superior to 90. Measurements performed on oil validate the use of the Lamb system. Oil density is evaluated at 939 kg/m3 and dynamic viscosity at 43 mPa·s which corresponds to our expected values. This shows the possibility of using the sensor outside of the calibration range.

Electromechanical resonators for sensing fluid density and viscosity—a review

“…The model is adequate for representing QCM [6,116], piezoelectric cantilevers [125,126], and QTF sensors [47,48] but also applies to more complex sensors. In [127] a glass plate and piezoelectric ceramic composite vibrating at a higher antisymmetric Lamb mode, in [128] an aluminum nitride-based resonator using the so-called roof-tile mode, and in [129] a CMUT fluid sensor were all successfully modeled by the BVD.…”