In the past decade, humidity measurements have ubiquitously gained
consideration in the wide range of application paradigms such as industrial
predictive maintenance, instrumentation, automation, agriculture,
climate monitoring, healthcare, and semiconductor industries. Accurate
humidity measurements and cost-effective fabrication processes for
large-volume and high-performance sensors with flexible form factors
are essential to meet the stringent performance requirements of the
emerging application areas. To address this need, recent efforts focus
on development of innovative sensing modalities, process technologies,
and exploration and integration of new materials to enable low-cost,
robust, and flexible humidity sensors with ultrahigh sensitivity and
linearity, large dynamic range, low hysteresis, and fast response
time. In this review paper, we present an overview of flexible humidity
sensors based on distinct sensing mechanisms, employed processing
techniques, and various functional sensing layers and substrate materials
for specific applications. Furthermore, we present the critical device
design parameters considered to be indicative of sensor performance
such as relative humidity range, along with a discussion on some of
the specific applications and use cases.