Piezodriven scanner for cryogenic applications

Abstract

A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than lO!tm and a near-resonance travel of 100 11m ~hiIe ~m~ersed i~ liquid helium ~t 4.2 K. The scanner has been operated inside a pressure cell III a dllutlOn refngerator, where It dissipates less than 150,uW of heat at lOOmK.