Silicon Integrated Circuits 1985
DOI: 10.1016/b978-0-12-002960-0.50008-x
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Physics of VLSI Processing and Process Simulation

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“…The results of the silicon detector simulations without any shielding are shown in Figure . Because of the complexity of the physics underlying electron interaction with matter [e.g., Fichtner , ], Monte Carlo methods are used in Geant4 simulations to calculate the energy deposition. The electron energy deposition shows significant scatter.…”
Section: Simulations In Geant4mentioning
confidence: 99%
“…The results of the silicon detector simulations without any shielding are shown in Figure . Because of the complexity of the physics underlying electron interaction with matter [e.g., Fichtner , ], Monte Carlo methods are used in Geant4 simulations to calculate the energy deposition. The electron energy deposition shows significant scatter.…”
Section: Simulations In Geant4mentioning
confidence: 99%