Physically-based simulation of electromigration induced failures in copper dual-damascene interconnect

Sukharev, Valeriy

doi:10.1109/isqed.2004.1283677

SCS 2003. International Symposium on Signals, Circuits and Systems. Proceedings (Cat. No.03EX720)

DOI: 10.1109/isqed.2004.1283677

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Physically-based simulation of electromigration induced failures in copper dual-damascene interconnect

Valeriy Sukharev¹

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Physically-based simulation of electromigration induced failures in copper dual-damascene interconnect

Abstract: Abstract

Cited by 0 publications

References 13 publications

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