Abstract:Tin oxide (SnO 2 ) films were grown by radio frequency magnetron sputtering at room temperature condition on glass substrates at various deposition times from 10 to 30 minutes with 10 minutes time intervals. A ceramic target of tin oxide was used and sputtering process with the argon and oxygen flow rate of 25 sccm and 8 sccm, respectively. The power given to the system is 225 W and total chamber pressures of 8.25 mTorr were used during the deposition. The deposition rate of SnO 2 thin film at this condition w… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.