Dual-layer Metallic grating (DMG) structures as surface-enhanced Raman scattering (SERS) substrates are studied using benzenethiol as the probe analyte. The DMG structure consists of a SiO 2 grating and 100-nm-thick gold coating layers. An enhancement factor of 10 5 is achieved by optimizing the SiO 2 grating height within the range from 165 to 550 nm. The enhancement factor dependence on the SiO 2 grating height is due to the surface plasmon excitation, which is dependent on the polarization of the incident light, and confirmed by finite difference time domain simulations. This study demonstrates the advantages of high uniformity, reproducibility and sensitivity in the DMG structures for SERS applications. surface-enhanced Raman scattering, surface plasmon, dual-layer metallic grating Citation: Guan Z Q, Håkanson U, Anttu N, et al. Surface-enhanced Raman scattering on dual-layer metallic grating structures.Surface-enhanced Raman scattering (SERS) has been widely studied in recent decades due to the high chemical specificity of vibrational spectra and increased detection efficiency by huge enhancement factors. It has been recognized that the origin of the enhancement in SERS is coming from electromagnetic (EM) and chemical components [1-3]. The EM enhancement coming from the excitation of surface plasmons (SPs) in noble or transition metals is usually several orders of magnitude higher than the chemical enhancement, and thus it is the main contributor to the SERS enhancement for most cases [4][5][6][7]. SPs are the collective oscillations of the electron gas in a metal. The excitation of SPs in metal nanostructures can produce an enhanced optical field, which is the physical basis for surface-enhanced spectroscopy, particularly for SERS. A volume where the electromagnetic field is strongly enhanced is usually called a "hot spot". When the molecules are located in the "hot spots", the Raman scattering intensity will be significantly magnified, which largely improves the sensitivity of Raman detection even to a single molecule level [8,9]. The high sensitivity and fingerprint property make SERS a powerful technique for chemical-and bio-sensing applications [10][11][12]. Recently, SERS was employed in the diagnosis and therapy of diseases [13][14][15].In the studies of SERS, different substrates have been developed, of which colloidal metal nanoparticles are widely used due to their large SERS enhancement and easy preparation. Single molecule SERS experiments were achieved in colloidal nanoparticle systems. In addition, the electromagnetic enhancement contribution to SERS was also first clearly elucidated from both experiment and theory in Ag nanoparticle aggregates [5,16], in which the gaps between the nanoparticles are "hot spots" for SERS due to the strong electromagnetic coupling between adjacent particles. However, the plasmonic coupling is often sensitive to the polarization of the excitation light, so the SERS intensity in metal nanostructures is usually polarization dependent [17,18]. Our recent work [6] sho...