2013
DOI: 10.1016/j.jallcom.2012.08.021
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Physical and mechanical properties of the Ti Zr1−N thin films

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Cited by 13 publications
(6 citation statements)
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“…Friction behavior of coatings -friction coefficient f and torque М, counterbody wear intensity by volume с , counterbody wear rate Vc, and wear behavior of coatings -coating wear intensity by volume coat and by mass coat were described in [11][12].…”
Section: Methodsmentioning
confidence: 99%
“…Friction behavior of coatings -friction coefficient f and torque М, counterbody wear intensity by volume с , counterbody wear rate Vc, and wear behavior of coatings -coating wear intensity by volume coat and by mass coat were described in [11][12].…”
Section: Methodsmentioning
confidence: 99%
“…In particular, a three-component layer (Ti,Zr)N was deposited during the sputtering of the Ti target with a magnetron sputter and the evaporation of the Zr cathode was carried out by an arc evaporator. In the process of forming a multicomponent layer (Ti,Zr,Al)N, two magnetron sputters with Zr and Al targets and one arc evaporator with a Ti cathode were used [[1], [2], [3], [4], [5], [6], [7], [8], [9], [10], [11], [12]]. The technological parameters were changed in the following ranges: evaporator arc current (I = 75–80 A), magnetron discharge power (N = 1.5–9.0 kW), bias voltage on the substrate (Ubias = 40–200 V), partial pressure of the gas mixture of nitrogen and argon (P = 0.24–1.4 Pa), the nitrogen content in the gas mixture (N2 = 12–100%) and the duration of the coating deposition (Tс = 5–45 min).…”
Section: Experimental Design Materials and Methodsmentioning
confidence: 99%
“…Besides that, the interfacial microstructure, the microscopic mechanism of interfacial bonding, and the formation mechanism of the interfacial compounds are difficult to study by experiment. For example, the TiZrN 2 phase appears in the interface during the experiment, but the formation mechanism of the TiZrN 2 phase is not clear.…”
Section: Introductionmentioning
confidence: 99%
“…The results showed that the thin‐film coatings with different composition and structure can be obtained depending on the number of plasma sources and the type (magnetron or electric arc) and the target material. G. Abadias and Anna Kameneva investigated the properties of the Ti x Zr 1−x N thin films and found that the TiZrN 2 phase appears in the interface during the preparation processing.…”
Section: Introductionmentioning
confidence: 99%