2000
DOI: 10.1002/1521-4095(200007)12:14<1055::aid-adma1055>3.0.co;2-#
|View full text |Cite
|
Sign up to set email alerts
|

Photosensitive Polyimide/Silica Hybrids

Abstract: Improved performance of polymers, with respect to their mechanical and electrical properties for microelectronic applications, for example, can be obtained by introducing nanometer‐size inorganic particles into the polymer matrix. The preparation and properties—particularly the photolithographic ones—of hybrids of a photosensitive polyimide (shown in the Figure) and silica are reported for the first time.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

0
37
0

Year Published

2004
2004
2015
2015

Publication Types

Select...
10

Relationship

0
10

Authors

Journals

citations
Cited by 66 publications
(37 citation statements)
references
References 26 publications
0
37
0
Order By: Relevance
“…Therefore, the incorporation of a silica phase within the PI matrix may represent a good solution to overcome this problem. However, only a limited number of PI/silica materials have shown to be photopatternable [67,68]. For instance, photosensitive PI/silica hybrids were developed by Wang et al [69].…”
Section: Applicationsmentioning
confidence: 99%
“…Therefore, the incorporation of a silica phase within the PI matrix may represent a good solution to overcome this problem. However, only a limited number of PI/silica materials have shown to be photopatternable [67,68]. For instance, photosensitive PI/silica hybrids were developed by Wang et al [69].…”
Section: Applicationsmentioning
confidence: 99%
“…As for PI/inorganic composite, the inorganic component is incorporated into the organic resin matrix and displays some particular characteristics. PI/inorganic composite materials have combined the special structure of inorganic component and excellent properties of PI and have become a type of promising materials focused on various applications [27][28][29]. In the past years, a number of researches have been carried out on the preparation and characterization of homogeneous polyimide-silica composite materials [30][31][32][33][34][35][36][37][38][39].…”
Section: Introductionmentioning
confidence: 99%
“…Photodefinable nanocomposites (PDNCs), which are nano-scale composites of photodefinable polymer with nanoparticles, are used to improve mechanical, thermal, and optical properties of photodefinable polymers by choosing different kinds of nano-fillers [1][2][3][4]. There are three methods to prepare PDNCs, that is, sol-gel method, intercalation method, and the method of direct dispersion of nanoparticles.…”
Section: Introductionmentioning
confidence: 99%