Abstract:Alternating multilayer films of hydrogen diluted hydrogenated protocrystalline silicon (pc-Si:H) were prepared using a plasma-enhanced chemical vapor deposition technique. The microstructure of the deposited films and photoresponse characteristics of their Schottky diode structures were investigated by Raman scattering spectroscopy, Fourier transform infrared spectroscopy and photocurrent spectra. Microstructure and optical absorption analyses suggest that the prepared films were pc-Si:H multilayer films with … Show more
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