Laser-Based Micro- And Nanoprocessing XVIII 2024
DOI: 10.1117/12.3002862
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Photonic shaping tools for large-scale micro-machining

Dion C. Mathews,
Jikai Wang,
Myriam Kaiser
et al.

Abstract: We introduce ultrafast laser machining concepts where microscopic modifications can be produced at macroscopic levels. The efficient use of the source's energy and power performance is enabled by optical tools that distribute the radiation onto large surfaces or into large volumes. Here, holographic beam splitters are used to create focus copies at arbitrary positions in the working volume of a focusing unit. This allows, for example, to cut transparent materials with customized edges in a single laser pass or… Show more

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