2010
DOI: 10.1063/1.3429125
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Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide

Abstract: A deterministic design of an ultrahigh Q, wavelength scale mode volume photonic crystal nanobeam cavity is proposed and experimentally demonstrated. Using this approach, cavities with Q> 10 6 and on-resonance transmission T>90% are designed. The devices fabricated in Si and capped with low-index polymer, have Q=80,000 and T=73%. This is, to the best of our knowledge, the highest transmission measured in deterministically designed, wavelength scale high Q cavities.Photonic crystal (PhC) The large computational … Show more

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Cited by 330 publications
(279 citation statements)
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“…We have also fabricated diamond photonic crystal nanobeam cavities 27 using our angled-etching approach. These devices consist of a waveguide perforated with a chirped lattice of elliptically shaped air holes, which has been engineered to support resonances with ultrahigh Q-factors and ultra small mode volumes 28 . Figure 3a-c displays a representative single-crystal diamond nanobeam cavity fabricated with etch angle yB35°for operation in the telecom band (see Supplementary Fig.…”
Section: Resultsmentioning
confidence: 99%
“…We have also fabricated diamond photonic crystal nanobeam cavities 27 using our angled-etching approach. These devices consist of a waveguide perforated with a chirped lattice of elliptically shaped air holes, which has been engineered to support resonances with ultrahigh Q-factors and ultra small mode volumes 28 . Figure 3a-c displays a representative single-crystal diamond nanobeam cavity fabricated with etch angle yB35°for operation in the telecom band (see Supplementary Fig.…”
Section: Resultsmentioning
confidence: 99%
“…They consist of a suspended ridge waveguide with a line of uniformly spaced air holes. A cavity is introduced in the centre of the nanobeam by deterministically varying the size of the holes according to the "modulated Bragg" design [39]: The filling factor FF of each nanobeam segment linearly decreases from the cavity centre to the edge of the structure. Here the filling factor is defined as the ratio of the hole area to the area of each unit cell.…”
mentioning
confidence: 99%
“…3.5 Â 10 8 cm À2 ). 15 13 as shown in Fig. 1(b), an AFM scan of the fQW epilayer prior to the growth of the GaN cap.…”
mentioning
confidence: 99%
“…11,12 The particular cavity design utilized for these studies comprises a ridge waveguide perforated with gratings of circular holes designed using a deterministic high-Q method 13,14 (Q ¼ quality factor). The cavity has a total length of 5.2 lm with a hole periodicity of 130 nm.…”
mentioning
confidence: 99%