Extreme Ultraviolet (EUV) Lithography X 2019
DOI: 10.1117/12.2514933
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Photon detector calibration in the EUV spectral range at PTB

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“…Since the quantum efficiency of the calibrated SDD is well known, the CMOS quantum efficiency can be deduced by comparison. While the quantum efficiency could be measured with a calibrated beamline while mapping the whole detector area [32], the selected approach allows obtaining a mean detection efficiency of the pixel array for selected X-ray energies. Since the detector is positioned far from the sample compared to the detection area, the chip is illuminated homogeneously by the isotropically emitted XRF photons.…”
Section: Jinst 16 P03033mentioning
confidence: 99%
“…Since the quantum efficiency of the calibrated SDD is well known, the CMOS quantum efficiency can be deduced by comparison. While the quantum efficiency could be measured with a calibrated beamline while mapping the whole detector area [32], the selected approach allows obtaining a mean detection efficiency of the pixel array for selected X-ray energies. Since the detector is positioned far from the sample compared to the detection area, the chip is illuminated homogeneously by the isotropically emitted XRF photons.…”
Section: Jinst 16 P03033mentioning
confidence: 99%