Photoluminescence properties of thin-film SiO_xC_y deposited by O-Cat CVD technique using MMS and TEOS

Silicon Compound Nanomaterials: Exploring Emission Mechanisms and Photobiological Applications

“…Silicon carbide (SiC) and oxycarbide (SiO x C y ) thin films can play a crucial role in Si-based optoelectronic and photonic devices. [29,[120][121][122][123] Silicon oxycarbide (SiO x C y ) denotes the structure where Si is simultaneously bound to oxygen and carbon. It is considered a hybrid-nature material that owns the attributes of organic and inorganic functional groups.…”

“…[127][128][129] Different research groups demonstrate that carbide and oxycarbide matrices provide many more attractive features than conventional matrices. [22,28,29,120,121,[130][131][132] Diverse research groups have also explored various applications of SiO x C y thin films in the biomedical field, as radiation-tolerant material, gas barrier coating for PET bottles, anode material for storage batteries, and piezoresistive sensors, among others. [133][134][135][136][137][138][139][140][141][142][143] It is possible to regulate the refractive index between 3.2 and 1.5, respectively, by changing the oxygen-carbon ratio in this matrix.…”

“…[145,146] Conversely, in recent years, the PL study on SiO x C y thin films has increased prominence due to its wide range of intensive emission in the visible spectra in recent years. [29,[120][121][122][123] Table 3 summarizes different methods for obtaining Si QDs embedded in the carbide and oxycarbide matrices and some of their related properties.…”